西北师范大学学报（自然科学版）2026，Vol.62Issue(2)：110-131,22.DOI:10.16783/j.cnki.nwnuz.2026.02.008
激光等离子体辐射流体力学程序RHDLPP及其在极紫外光刻光源中的应用
RHDLPP:a radiation-hydrodynamics code for laser-produced plasmas and its application in EUVL light sources
摘要
Abstract
Radiation-hydrodynamics(RHD)simulation is a key approach for studying laser-produced plasmas,enabling a self-consistent description of the strongly coupled evolution of hydrodynamic motion,radiation transport,and atomic processes,providing quantitative guidance for interpreting experiments and optimizing operating parameters.This paper summarizes the overall architecture and core functional modules of the radiation hydrodynamics code for laser-produced plasma,RHDLPP,developed by our group in recent years,and systematically demonstrates its applications to simulations of extreme ultraviolet(EUV)lithography light sources.RHDLPP is built on an RHD backbone and integrates modules for fluid evolution,thermal conduction,laser propagation and energy deposition,radiation transport,multi-material equations of state,and ionization/radiation models.Combined with spectroscopic post-processing consistent with the detector viewing geometry,it enables self-consistent predictions of plasma spatiotemporal evolution and spectral observables.In terms of applications,we present two-dimensional evolution and EUV spectral-shape simulation results for plasmas generated by nanosecond-laser irradiation of a solid tin(Sn)planar target and a liquid Sn microdroplet target.We discuss the influence of temperature,density,and optical-depth effects on the emission peak near 13.5 nm and associated self-absorption signatures,and quantitatively evaluate the in-band output and its angular dependence.In addition,by coupling to a multiphase-flow model that accounts for surface tension,we simulate microdroplet deformation induced by nanosecond and picosecond prepulses,and on this basis establish a coupled simulation workflow for main-pulse interaction with the deformed target.This framework provides a computable physical basis and methodological support for prepulse shaping and target-morphology optimization,with the goal of improving in-band EUV performance.关键词
激光等离子体/辐射流体力学程序/极紫外光刻光源Key words
laser-produced plasma/radiation-hydrodynamics code/extreme ultraviolet lithography light source分类
数理科学引用本文复制引用
马驰,苏茂根,董晨钟,敏琦..激光等离子体辐射流体力学程序RHDLPP及其在极紫外光刻光源中的应用[J].西北师范大学学报（自然科学版）,2026,62(2):110-131,22.基金项目
甘肃省省级人才青年个人项目资助课题(2025QNGR15) （2025QNGR15）
