中国钼业2026，Vol.50Issue(2)：89-94,6.DOI:10.13384/j.cnki.cmi.1006-2602.2026.02.012
钛粉粒径对钼钛靶材微观组织及薄膜性能的影响
Effect of titanium powder particle size on the microscopic structure of Mo-Ti target and film properties
摘要
Abstract
To enhance the comprehensive performance of Mo-Ti alloy sputtering targets and the quality of the deposited films,a system-atic study was conducted to investigate the effects of titanium powder particle size on the microstructural evolution of the Mo-Ti targets and the performance of the resulting films.Coarse and fine titanium powders were mixed separately with molybdenum powder,and the mixtures were fabricated into Mo-Ti targets through cold isostatic pressing(CIP)and hot isostatic pressing(HIP).XRD,SEM/EBSD were employed to characterize the phase composition,grain distribution,and density of the targets,while AFM and four-point probe techniques were used to measure the surface roughness and resistivity of the sputtered films.The results show that the finer titanium powder target exhibits a higher density(7.381 g/cm3)and a higher Mo-Ti alloy phase ratio(63.2%).The films sputtered from the finer titanium powder target display a smoother surface and more uniform thickness.Although the films resistivity is slightly higher(9.7×10-4 Ω·cm),the finer titanium powder promotes homogeneous mixing and enhances atomic diffusion,significantly improving the com-positional homogeneity of the targets and the surface quality of the films.Considering the comprehensive performance,including density,microstructural uniformity,and films quality,the finer titanium powder combined with molybdenum powder meets the requirements of high-performance sputtering targets better than the coarser titanium powder.关键词
钛粉/钼钛靶材/磁控溅射/微观组织Key words
titanium powder/Mo-Ti target/magnetron sputtering/microstructure分类
矿业与冶金引用本文复制引用
张雪凤,李帅方,李庆奎,陈立甲,宋旭光,陈亚光,梁十军..钛粉粒径对钼钛靶材微观组织及薄膜性能的影响[J].中国钼业,2026,50(2):89-94,6.基金项目
河南省重点研发专项(241111231200) （241111231200）
