真空电子技术Issue(2)：67-75,9.DOI:10.16540/j.cnki.cn11-2485/tn.2026.02.12
一种三维大气压微波等离子体装置高效设计的数值计算模型
A Numerical Calculation Model for Efficient Design of Three-dimensional Atmospheric Pressure Microwave Plasma Devices
钟南亚1
作者信息
- 1. 中国电子科技集团有限公司第十研究所,四川 成都 610036
- 折叠
摘要
Abstract
A WAWoP(With and Without Plasma)numerical calculation model is proposed based on the BTA simplified fluid model,the DRUDE model and a BP artificial neural network,which can efficiently accomplish the design and optimization of three-dimensional atmospheric pressure microwave plasma devices.The model takes the maximum electric field strength under the WoP(Without Plasma)condition and the power reflection coefficient un-der the WP(With Plasma)condition as the main optimization objectives.It only requires electromagnetic field cal-culations under these two conditions,thereby significantly improving the calculation efficiency.The BTA simplified fluid model is used to calculate the power reflection coefficient under different microwave incident powers and av-erage electric field strengths.Meanwhile,the calculated results of electron temperature and electron density are con-verted via the DRUDE model and then applied in the WAWoP model calculations.The results show that the power reflection coefficients obtained from the two models exhibit small differences under various conditions,preliminari-ly verifying the feasibility of the WAWoP model.关键词
微波等离子体/WAWoP数值计算模型/BTA简化流体模型/BP人工神经网络/DRUDE模型Key words
Microwave plasma/WAWoP numerical calculation model/BTA simplified fluid model/BP artifi-cial neural network/Drude model分类
数理科学引用本文复制引用
钟南亚..一种三维大气压微波等离子体装置高效设计的数值计算模型[J].真空电子技术,2026,(2):67-75,9.
