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Large-scale gate-all-around MoS2 transistor array through lossless monolithic 3D integration

Chao Chen Zhangyi Chen Zheng Zhang Xiankun Zhang Yue Zhang Kuanglei Chen Hang Zhao Shucao Lu Jinsen Shang He Jiang Li Gao Xiaoyu He Shihua Jiang

国家科学评论（英文版）2026，Vol.13Issue(6)：193-203,11.

国家科学评论（英文版）2026，Vol.13Issue(6)：193-203,11.DOI:10.1093/nsr/nwaf539

Large-scale gate-all-around MoS2 transistor array through lossless monolithic 3D integration

Chao Chen ¹Zhangyi Chen ¹Zheng Zhang ¹Xiankun Zhang ¹Yue Zhang ¹Kuanglei Chen ¹Hang Zhao ¹Shucao Lu ¹Jinsen Shang ¹He Jiang ¹Li Gao ¹Xiaoyu He ¹Shihua Jiang¹

作者信息

1. Academy for Advanced Interdisciplinary Science and Technology,Key Laboratory of Advanced Materials and Devices for Post-Moore Chips Ministry of Education,State Key Laboratory for Advanced Metals and Materials,University of Science and Technology Beijing,Beijing 100083,China||School of Materials Science and Engineering,Beijing Key Laboratory for Advanced Energy Materials and Technologies,University of Science and Technology Beijing,Beijing 100083,China
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摘要

关键词

lossless monolithic 3D integration/2D MoS2/large scale/ultrahigh current density/gate-all-around/seed layer

Key words

lossless monolithic 3D integration/2D MoS2/large scale/ultrahigh current density/gate-all-around/seed layer

引用本文复制引用

Chao Chen,Zhangyi Chen,Zheng Zhang,Xiankun Zhang,Yue Zhang,Kuanglei Chen,Hang Zhao,Shucao Lu,Jinsen Shang,He Jiang,Li Gao,Xiaoyu He,Shihua Jiang..Large-scale gate-all-around MoS2 transistor array through lossless monolithic 3D integration[J].国家科学评论（英文版）,2026,13(6):193-203,11.

基金项目

This work was supported by the National Natural Science Foundation of China(52350301,52250398,92463308,62322402,52188101,52225206,92163205,62204012,52303362,62304019,52302162,52402169 and 62504018),the National Key Research and Development Program of China(2022YFA1203803 and 2023YFF1500401),the Beijing Nova Program(20220484145 and 20230484478),the Young Elite Scientists sponsorship program by the Chinese Association for Science and Technology(2022QNRC001),the Fundamental Research Funds for the Central Universities(FRF-TP-22-004C2,FRF-06500207 and FRF-IDRY-23-038),the State Key Lab for Advanced Metals and Materials(2023-Z05),the Postdoctoral Fellowship Program of the Chinese Postdoctoral Science Founda-tion(GZC20230233)and special support from the Postdoctoral Science Foundation(2023TQ0007 and BX20250290). （52350301,52250398,92463308,62322402,52188101,52225206,92163205,62204012,52303362,62304019,52302162,52402169 and 62504018）

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