测试技术学报2026，Vol.40Issue(2)：185-192,8.DOI:10.62756/csjs.1671-7449.2025080
应用于MEMS热电堆红外探测器的超表面吸收体
Metasurface Absorber for Application to MEMS Thermopile Infrared Detectors
摘要
Abstract
With the continuous development of infrared technology and increasing application demands,the key performance of MEMS thermopile infrared detectors,as one of the most widely used infrared detectors,needs to be further improved.A metasurface absorber that are integrated into the absorption region at the hot end of the MEMS thermopile is designed,and the infrared absorption reaches 75%in the 8～12 μm wide band.The surface temperature is increased by 28 mK in 140 μs by a 2×3 array of structural units,and the overall thickness is only 362 nm,and the preparation process is compatible with MEMS thermopiles,which provides a strong reference for realizing the mass production of high-performance MEMS thermopile chips with the combination of the metasurface.关键词
超表面/热电堆/红外探测器/红外吸收/有限元分析Key words
metasurface/thermopile/infrared detector/infrared absorption/finite element analysis分类
信息技术与安全科学引用本文复制引用
邵泊游,王丙寅,王志强,雷程,李丰超..应用于MEMS热电堆红外探测器的超表面吸收体[J].测试技术学报,2026,40(2):185-192,8.基金项目
国家自然科学基金资助项目(62301509,62304209) （62301509,62304209）
山西省基础研究计划资助项目(202203021222079,20210302123203) （202203021222079,20210302123203）
山西省科技重大专项"揭榜挂帅"项目(202301030201003) （202301030201003）
