测试技术学报2026，Vol.40Issue(2)：205-212,8.DOI:10.62756/csjs.1671-7449.2026010
压敏电阻排布方式对四端固支梁压阻式加速度计输出影响研究
Influence Study of Arrangement of Varistor on Output of A Four-Terminal Fixed Beam Piezoresistive Accelerometer
摘要
Abstract
The arrangement positions of piezoresistors have a significant impact on the voltage output response of piezoresistive vibration sensors.Studying the effects of different piezoresistor arrangements on the output of a four-end fixed beam piezoresistive accelerometer is of great significance.Four distinct piezoresistor layout configurations are proposed:four resistors arranged at the root of the cantilever beam,four resistors distributed at the edges of the mass block,interleaved arrangement of resistors at the root of the cantilever beam and the edges of the mass block on opposite sides of the sensor,interleaved arrangement of resistors at the root of the cantilever beam and the edges of the mass block on adjacent sides of the sensor.Simulation analyses were conducted to evaluate the output response of accelerometer chips with these configurations.The simulations examined the output voltage when the accelerometer was subjected to an acceleration of 10g and an input voltage of 5 V.The results indicate that the Wheatstone bridge composed of resistors in the mixed arrangement—alternating between the cantilever beam root and the proof mass-cantilever beam connection region—achieves the highest output voltage of 1.36 mV.This value is 3 to 8 times greater than that of the other three con-figurations,demonstrating an enhancement in accelerometer sensitivity.关键词
压阻效应/加速度计/惠斯通电桥/COMSOL有限元仿真/应力分布Key words
piezoresistive effect/accelerometer/Wheatstone bridge/COMSOL finite element simula-tion/stress distribution分类
信息技术与安全科学引用本文复制引用
卢晓曼,李婉华,邸瑜,王思哲,余建刚,梁庭..压敏电阻排布方式对四端固支梁压阻式加速度计输出影响研究[J].测试技术学报,2026,40(2):205-212,8.基金项目
山西省科技重大专项"揭榜挂帅"项目(202301030201003) （202301030201003）
