传感技术学报2026，Vol.39Issue(4)：747-752,6.DOI:10.3969/j.issn.1004-1699.2026.04.007
微机械陀螺检测单元的阵列设计与动力学分析
Array Design and Dynamic Analysis of Micromachined Gyro Detection Unit
摘要
Abstract
To solve the contradiction between bandwidth and gain of multi-degree-of-freedom of micro-gyroscopes,an array design of sensing element for a class of three-degree-of-freedom micro-gyroscope with a single-degree-of-freedom driving system and a complete two-degree-of-freedom sensing system is performed.Then,the effects of different parameters on the gain and bandwidth performance of the array micro-gyroscope are investigated by solving the dynamical equations of the system under linear and nonlinear conditions.The results show that compared with the non-array gyroscope,the array gyroscope achieves a multiplier increase in gain with a constant band-width.The effect of manufacturing process errors on the detection performance of the array micro-gyroscope in linear and nonlinear cases is also considered.关键词
非线性微陀螺/阵列设计/增益/带宽Key words
nonelinear micro-gyro/array design/gain/bandwidth分类
数理科学引用本文复制引用
郝淑英,贾沁洪,张昆鹏,王赛..微机械陀螺检测单元的阵列设计与动力学分析[J].传感技术学报,2026,39(4):747-752,6.基金项目
国家自然科学基金项目(12072234) （12072234）
