光学精密工程2026，Vol.34Issue(7)：1047-1056,10.DOI:10.37188/OPE.20263407.1047
基于OF-CEAS的亚ppb量级氨气检测
Detection of ammonia gas at sub-ppb levels based on OF-CEAS
摘要
Abstract
To enhance the sensitivity and response speed of ammonia detection using laser absorption spec-troscopy,optical feedback cavity-enhanced absorption spectroscopy(OF-CEAS)was employed.The characteristic absorption line of ammonia near 6 612.7 cm⁻¹(1 512 nm)was selected as the target transi-tion.A V-shaped optical resonant cavity composed of three high-reflectivity mirrors was constructed,with a single-arm length of 20 cm.The ring-down time of the empty cavity was measured to be 48.12 μs,cor-responding to a finesse of approximately 100 000 and an equivalent absorption path length of 14.4 km.System stability was significantly improved through precise control of temperature and gas pressure.The optical setup was housed in a temperature-controlled chamber with a stability of±0.005 ℃.In addition,a self-developed high-precision pressure control system maintained the intracavity pressure at(30 000±1.5)Pa.Under these conditions,a detection limit as low as 12 parts per trillion(ppt)was achieved at an integration time of 168 s,corresponding to a minimum detectable absorption coefficient of 1.35×10⁻¹⁰ cm⁻¹.To mitigate response delays caused by adsorption of ammonia molecules on the inner surfaces of the gas cell and pipelines,a miniaturized cavity with a volume of 7.8 mL was implemented to reduce molecular residence.Furthermore,silane passivation coatings were applied to critical pipeline sec-tions and the inner cavity surface to suppress adsorption effects,resulting in a reduction of the average sys-tem response time to 196 s.关键词
光学反馈腔增强吸收光谱/痕量气体检测/高精度温压控/氨气吸附效应Key words
optical feedback cavity enhanced absorption spectroscopy/trace gas detection/high-precision temperature and pressure control/ammonia adsorption effect分类
数理科学引用本文复制引用
袁帅博,程子伟,张梓浩,尹润涛,赵刚,周晓彬,杨家琪,闫晓娟,马维光..基于OF-CEAS的亚ppb量级氨气检测[J].光学精密工程,2026,34(7):1047-1056,10.基金项目
国家重点研发计划资助项目(No.2023YFF0614000) （No.2023YFF0614000）
国家自然科学基金资助项目(No.62327813,No.61905136,No.62175139) （No.62327813,No.61905136,No.62175139）
中央引导地方科技发展资金项目(No.YDZJSX2024D001) （No.YDZJSX2024D001）
山西省重点研发计划资助项目(No.202302090301014) （No.202302090301014）
山西省青年基金资助项目(No.202403021222027) （No.202403021222027）
山西省留学回国人员科技活动择优资助项目(No.20220001) （No.20220001）
