光学精密工程2026，Vol.34Issue(7)：1057-1067,11.DOI:10.37188/OPE.20263407.1057
大深径比微孔几何参数视觉检测
Visual detection for geometric parameters of high aspect ratio micro-holes
摘要
Abstract
To address the high equipment cost of conventional laser confocal microscopy and the limita-tions of traditional machine vision methods caused by uneven well-bottom illumination,image blurring,and difficulty in feature extraction,an automated machine vision measurement system based on coaxial illu-mination is proposed.The system comprises an industrial camera,a telecentric lens integrated with a coax-ial light source,and a three-axis precision displacement stage.A hybrid algorithm combining autofocusing and feature recognition is employed as the core measurement strategy.Experimental results demonstrate stable and reliable system performance.For seven types of samples with aspect ratios ranging from 3.17 to 7.87,excellent measurement performance was achieved.The repeatability of aperture measurements ranges from 0.56 μm to 4.58 μm,while the repeatability of depth measurements reaches as low as 0.80 μm,with a minimum coefficient of variation of 0.09％.The deviation between the average measured val-ues and nominal values is generally less than 1％.The proposed system enables efficient and high-preci-sion measurement of geometric parameters of high-aspect-ratio micro-holes,providing a cost-effective solu-tion for quality control in precision microstructure manufacturing.关键词
微孔测量/深径比/自动对焦/Tenengrad梯度函数/大津法Key words
micropore measurement/aspect ratio/autofocus/Tenengrad gradient function/OTSU分类
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田安宇,刘研,葛洲,江宇辰,于瀛洁,夏新星..大深径比微孔几何参数视觉检测[J].光学精密工程,2026,34(7):1057-1067,11.基金项目
国家自然科学基金资助项目(No.62575167) （No.62575167）
教育部产学合作协同育人项目(No.241204575194133) （No.241204575194133）
上海市"科技创新行动计划"专项项目(No.24511106502) （No.24511106502）
上海大学联合大作业资助项目(No.LH2025013) （No.LH2025013）
