光学精密工程2026，Vol.34Issue(8)：1232-1244,13.DOI:10.37188/OPE.20263408.1232
光学元件六自由度位姿高精度检测方法
High-precision measurement method for 6-DOF pose of optical components
摘要
Abstract
To meet the demand for nanometer-level displacement and microradian-level angular high-preci-sion measurement of optical components in fields such as lithography systems,precision assembly,and space optics,and to address the limitations of existing methods in achieving multi-degree-of-freedom(DOF)synchronous and integrated measurement,this paper proposed and experimentally validated a mea-surement system based on multi-channel differential laser interferometry.By designing a seven-channel in-terferometer configuration and establishing a unified mathematical model,simultaneous solving of six-DOF pose parameters—including translational displacements and rotational angles—of optical components was realized.Simulation results indicated that,under ideal conditions,the root-mean-square(RMS)er-rors of translational measurements in the X,Y,and Z directions were better than 3.384 nm,while the an-gular measurement errors did not exceed 4.616 μrad.Experimental verification demonstrated that,in a static environment,the RMS stability of displacement and angular measurements reached 7 nm and 16.4 μrad,respectively.Under step inputs of-300 μrad and-500 μrad,the linear correlation coefficients be-tween the system outputs and autocollimator reference values were 0.984 and 0.937,respectively,with residual RMS errors maintained within 44 μrad.The proposed system featured a compact structure,strong resistance to environmental disturbances,and high linearity,making it suitable for real-time pose monitoring in high-precision applications.Future work will focus on multi-DOF coupling error calibration and adaptability un-der dynamic environments to further enhance the practicality and reliability of the system.关键词
精密装调/高精度测量/六自由度位姿测量/多通道差分激光干涉Key words
precision alignment/high-precision measurement/six-degree-of-freedom pose measure-ment/multi-channel differential laser interferometry分类
机械制造引用本文复制引用
刘昊天,曾雪锋,李雯研,王灵杰,张学军..光学元件六自由度位姿高精度检测方法[J].光学精密工程,2026,34(8):1232-1244,13.基金项目
吉林省重大专项(No.SKL202302023) （No.SKL202302023）
基金委重大仪器研制项目(No.62127901) （No.62127901）
中国科学院青促会(No.2020224) （No.2020224）
