光学精密工程2026，Vol.34Issue(8)：1255-1267,13.DOI:10.37188/OPE.20263408.1255
基于抗磁悬浮的微型平面电机驱控设计
Diamagnetic levitation-based micro planar motor drive design
摘要
Abstract
To address the limitations of continuous motion and complex drive structures in permanent mag-net type diamagnetically levitated micro planar motors,this paper proposed a single-sided driven three-de-gree-of-freedom(3-DOF)micro-actuator with a PM array.This design achieved a unified approach to structural simplification and multi-DOF decoupled control.The system employed ultra-thin flexible print-ed circuit(FPC)serpentine coils to generate an adjustable magnetic field via four independent current chan-nels.Based on magnetic field analysis and an equivalent magnetic dipole model,a mathematical model be-tween current and electromagnetic force was established,forming a 3-DOF open-loop decoupling control method.Experimental results demonstrate stable 3-DOF motion covering a wide XY-plane area of 7 mm×7 mm,while maintaining good linearity throughout the range.The positioning accuracy achieves±8.232 μm and repeatability is±5.690 μm.By finely adjusting the driving current,the system achieves a Z-axis resolution of 0.95 μm and a displacement adjustment range of approximately 23 μm.Compared to conventional active magnetic levitation platforms,this structure reduces volume by more than an order of magnitude,significantly lowers current requirements and manufacturing costs,and demonstrates excellent potential for high-precision micro-positioning applications.关键词
抗磁悬浮技术/微型平面电机/超薄印刷电路板/谐波分析/开环控制Key words
diamagnetic levitation technology/micro planar motors/ultra-thin FPC/harmonic analysis/open-loop control分类
信息技术与安全科学引用本文复制引用
张鹤,施至超,朱志伟..基于抗磁悬浮的微型平面电机驱控设计[J].光学精密工程,2026,34(8):1255-1267,13.基金项目
中央高校基本科研业务费专项资金资助(No.30924010942) （No.30924010942）
