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动态力校准用Al2O3脆性材料断裂特性影响因素及测试方法研究

顾廷炜 杨凝 冯政森 陈文浩

测试技术学报2026,Vol.40Issue(3):275-281,7.
测试技术学报2026,Vol.40Issue(3):275-281,7.DOI:10.62756/csjs.1671-7449.2026017

动态力校准用Al2O3脆性材料断裂特性影响因素及测试方法研究

Influence Factor and Test Method Research on Fracture Characteristics of Al2O3 Brittle Materials for Dynamic Force Calibration

顾廷炜 1杨凝 2冯政森 1陈文浩1

作者信息

  • 1. 中科芯集成电路有限公司,江苏 无锡 214072
  • 2. 中国电子科技集团公司信息科学研究院,北京 100042||集成电路与微系统全国重点实验室,北京 100042
  • 折叠

摘要

Abstract

In response to the complex fracture characteristics and the lack of measurement methods of brittle materials used for dynamic force calibration in three-point bending test,various factors affecting the fracture characteristics of brittle materials were analyzed,and a method for synchronously measuring the fracture amplitude and fracture time of brittle materials was proposed.Firstly,based on the three-point bending theory,the influence of material type,external dimension and support span on the fracture charac-teristics of brittle materials were analyzed.Subsequently,the fracture characteristics of Al2O3 brittle mate-rials were tested under 6 different external dimensions and support spans.Finally,the fracture amplitudes of Al2O3 brittle materials were predicted based on the fitting bending strength.The test results show that the effective frequency range of the step signal generated by the fracture of Al2O3 brittle materials with a thickness less than 5 mm is not less than 5 kHz,which can meet the dynamic calibration frequency band requirements of the strain gauge force measurement system.According to the measured data,the fitting bending strength of the Al2O3 brittle material is 355.42 MPa,and the maximum error between the pre-dicted fracture amplitude and the measured result is no more than 7.77%.

关键词

力值计量/动态校准/脆性材料/三点弯曲/断裂特性

Key words

force metrology/dynamic calibration/brittle material/three-point bending/fracture characteristic

分类

机械制造

引用本文复制引用

顾廷炜,杨凝,冯政森,陈文浩..动态力校准用Al2O3脆性材料断裂特性影响因素及测试方法研究[J].测试技术学报,2026,40(3):275-281,7.

基金项目

江苏省自然科学基金资助项目(BK20220228) (BK20220228)

测试技术学报

1671-7449

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