集成技术2026，Vol.15Issue(3)：82-95,14.DOI:10.12146/j.issn.2095-3135.20250817001
硅光子集成生化检测芯片的研究进展
Research Progress on Silicon Photonic Integrated Biochemical Sensing Chips
摘要
Abstract
In modern biomedical research and clinical diagnostics,the demand for multi-parametric and highly accurate biochemical detection is rapidly increasing.Silicon photonic chips,characterized by high transmission speed,low power consumption,and strong immunity to electromagnetic interference,offer unique advantages in biochemical sensing.Biochemical detection chips based on silicon photonic integration exhibit excellent performance and broad application prospects,and have become a research hotspot in this field.This paper reviews recent progress in silicon-photonic-integrated biochemical sensing chips,summarizes their advances across diverse detection domains such as liquids and gases,and highlights how different device architectures are tailored to specific analytes,aiming to further broaden the application scope of these chips in biochemical detection.关键词
硅光子学/集成/生化检测/生物医学Key words
silicon photonics/integration/biochemical detection/biomedicine分类
信息技术与安全科学引用本文复制引用
马晓楠,冯松,霍文博,杨延飞,韩超,方青,付鹏,李建婷,南秦喜..硅光子集成生化检测芯片的研究进展[J].集成技术,2026,15(3):82-95,14.基金项目
国家重点研发计划项目(2018YFB2200500) （2018YFB2200500）
国家自然科学基金项目(61204080) （61204080）
国家重点实验室基金项目(SKL201804) （SKL201804）
陕西省重点研发计划项目(2022GY-012) （2022GY-012）
陕西省技术创新引导计划项目(2025QCY-KXJ-041) （2025QCY-KXJ-041）
江苏省科技副总项目(FZ20240945) This work is supported by National Key Research and Development Program of China(2018YFB2200500),National Natural Science Foundation of China(61204080),State Key Laboratory Fund(SKL201804),Key Research and Development Program of Shaanxi Province(2022GY-012),Innovation Capability Support Program of Shaanxi Province(2025QCY-KXJ-041),and Jiangsu Province Deputy General Manager of Science and Technology Program(FZ20240945) （FZ20240945）
