计量学报2026，Vol.47Issue(4)：482-491,10.DOI:10.3969/j.issn.1000-1158.2026.04.02
六自由度运动原位测量机构的降维任务空间插值精度补偿方法
Dimensionality-reduction Task-space Accuracy Compensation Method of Six-degree-of-freedom Motion In-situ Measurement Mechanism
摘要
Abstract
To trace the six-degree-of-freedom(6-DOF)measurement results back to high-precision one-dimensional laser interferometry,a non-kinematic calibration-based dimensionality-reduced task-space interpolation compensation method is proposed.Specifically,linear and angular errors of each degree of freedom are measured using a high-precision one-dimensional laser interferometer,and the residual pose errors at multiple discrete points within the task space are obtained.A fuzzy inference system(FIS)is established to predict and compensate residual errors across arbitrary pose points in the task space.Experimental results show that the proposed method reduces the root mean square errors(eRMS)of 6-DOF position and orientation measurements to 1 μm and 10 μrad,corresponding to improvements of 77.98%and 86.34%in measurement accuracy,respectively.关键词
几何量计量/原位测量机构/空间插值/降维/六自由度运动/模糊推理系统/精度补偿/非运动学校准Key words
geometric measurement/in-situ measuring mechanism/spatial interpolation/dimensionality reduction/6-DOF motion/FIS/accuracy compensation/non-kinematic calibration分类
通用工业技术引用本文复制引用
张思琪,刘志华,任子啸,高磊,凃程旭,包福兵,蔡晨光..六自由度运动原位测量机构的降维任务空间插值精度补偿方法[J].计量学报,2026,47(4):482-491,10.基金项目
国家自然科学基金(52075512) （52075512）
先进溯源技术创新中心开放基金(AKYKF2410) （AKYKF2410）
中国计量科学研究院基本科研业务费(AKYZD2302) （AKYZD2302）
