面向光场调控的像素级红外超构透镜阵列设计与制备
Design and fabrication of pixel-level infrared metalens arrays for light field control
摘要
Abstract
Metalenses,with their unique optical field modulation characteristics and remarkable advantages of high inte-gration and miniaturization,have broad applications in the integrated imaging system of lightweight and small-sized op-toelectronic chips.In this paper,a metalens structure for pixel-level integrated infrared focal plane applications was de-signed.The preparation method combining stepper lithography technology and the Inductively Coupled Plasma(ICP)etching process was adopted.Through systematic optimization of etching parameters,such as gas flow rate,working pressure and power,the loading effect was effectively suppressed and the standard deviation of the etching rate was decreased from 0.205%to 0.073%.Finally,a highly uniform metalens array was fabricated,with a pixel center distance of 30 μm,an array of 640×512,and a maximum aspect ratio of 3.42 of Si pillars.The focusing distance for 4.3 μm wavelength infrared light is 35 μm.The measured optical field convergence efficiencies,within radial ranges of 10 μm and 20 μm in the central area at the focal length,are 66.4%and 84.9%,respectively.The optical field energy is increased by 5.98 times and 1.91 times,respectively,compared with that without the integrated metalens within the same area range.This study will provide the structural design and processing foundation for the integration of pixel-level metalens arrays with infrared chips.关键词
超构透镜/全介质/负载效应/刻蚀均匀性/光汇聚效率Key words
metalenses/all-dielectric/loading effect/etching uniformity/light convergence efficiency分类
数理科学引用本文复制引用
张风,王芳芳,周建,应翔霄,周易,陈建新..面向光场调控的像素级红外超构透镜阵列设计与制备[J].红外与毫米波学报,2026,45(2):207-216,10.基金项目
国家自然科学基金(U24A20294、62335017、62222412、62104236、62104237) （U24A20294、62335017、62222412、62104236、62104237）
国家重点研发计划(2022YFB3404405) （2022YFB3404405）
中国科学院先导项目(XDB0980000) （XDB0980000）
中国科学院青年创新促进会项目(Y202057) （Y202057）
上海市扬帆计划项目(22YF1455800、21YF1455000) （22YF1455800、21YF1455000）
上海市自然科学基金项目(23ZR1473500、23ZR1473100) （23ZR1473500、23ZR1473100）
中国科学院上海技术物理研究所创新专项(CX-513、CX-512、CX-508、CX-567) （CX-513、CX-512、CX-508、CX-567）
中国博士后科学基金资助项目(2024M75687) （2024M75687）
红外探测技术国家重点实验室(IRDT-23-01) Supported by the National Natural Science Foundation of China(U24A20294,62335017,62222412,62104236,62104237) （IRDT-23-01）
the National Key Research and Development Program of China(2022YFB3404405) （2022YFB3404405）
the Strategic Priority Research Program of the Chinese Academy of Sciences(XDB0980000) （XDB0980000）
the Youth Innovation Promotion Association,CAS(Y202057) （Y202057）
the Shanghai Sailing Program(22YF1455800,21YF1455000) （22YF1455800,21YF1455000）
the Shanghai Natural Science Foundation Program(23ZR1473500,23ZR1473100) （23ZR1473500,23ZR1473100）
the Special Innovation Program of Shanghai In-stitute of Technical Physics,Chinese Academy of Sciences(CX-513,CX-512,CX-508,CX-567) （CX-513,CX-512,CX-508,CX-567）
the China Postdoctoral Science Foundation(2024M750687) （2024M750687）
the National Key Laboratory of Infrared Detection Technologies(IRDT-23-01) 本文的光刻和刻蚀工艺是在上海科技大学材料器件中心(SMDL20191219)的支持下开展的,作者在此表示衷心的感谢. （IRDT-23-01）
