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首页|期刊导航|红外与毫米波学报|InAs/GaSb Ⅱ类超晶格长波焦平面红外探测器应力适应性研究

InAs/GaSb Ⅱ类超晶格长波焦平面红外探测器应力适应性研究

薛勇 徐庆 黄敏 王珍 梁钊铭 徐庆庆 白治中 陈建新

红外与毫米波学报2026,Vol.45Issue(2):250-257,8.
红外与毫米波学报2026,Vol.45Issue(2):250-257,8.DOI:10.11972/j.issn.1001-9014.2026.02.007

InAs/GaSb Ⅱ类超晶格长波焦平面红外探测器应力适应性研究

Research on stress adaptability of InAs/GaSb type Ⅱ superlattice long-wave focal plane infrared detectors

薛勇 1徐庆 2黄敏 2王珍 2梁钊铭 2徐庆庆 2白治中 2陈建新2

作者信息

  • 1. 上海大学 微电子学院,上海 201800||中国科学院上海技术物理研究所 红外成像材料与器件重点实验室,上海 200083
  • 2. 中国科学院上海技术物理研究所 红外成像材料与器件重点实验室,上海 200083
  • 折叠

摘要

Abstract

The superlattice long-wavelength infrared focal plane detectors operate at low temperatures.The differences in the thermal expansion coefficients among the various material layers of the detectors can lead to deformation and gen-erate thermal stress,which in turn affects the optoelectrical performance of the detector.This study designed two struc-tural modules to achieve the regulation of stress in the superlattice detectors.The changes in the dark current and spec-tral response of InAs/GaSb type Ⅱ superlattice long-wave infrared focal plane detectors under different stress conditions were explored.The research indicates that within the stress range of-10.7 MPa to 131.9 MPa,the variation in the opto-electrical performance of the detector is small.The detector was subjected to a temperature shock test,and it demon-strated high reliability.The research results provide guidance for the structural design of InAs/GaSb type Ⅱ superlattice long-wave infrared focal plane detectors and offer a basis for their performance and reliability assessment.

关键词

InAs/GaSb超晶格/焦平面/长波探测器/应力/可靠性

Key words

InAs/GaSb superlattice/focal plane/long-wave detector/stress/reliability

分类

信息技术与安全科学

引用本文复制引用

薛勇,徐庆,黄敏,王珍,梁钊铭,徐庆庆,白治中,陈建新..InAs/GaSb Ⅱ类超晶格长波焦平面红外探测器应力适应性研究[J].红外与毫米波学报,2026,45(2):250-257,8.

基金项目

中国科学院战略性先导科技专项(XDB0980000) (XDB0980000)

国家自然科学基金(62335017、62222412、62104236、62104237) (62335017、62222412、62104236、62104237)

上海市扬帆计划(22YF1455800、21YF1455000) (22YF1455800、21YF1455000)

中国科学院上海技术物理研究所创新专项基金(CX-513、CX-567) Supported by the Strategic Priority Research Program of the Chinese Academy of Sciences(XDB0980000) (CX-513、CX-567)

the National Natural Science Foundation of China(62335017,62222412,62104236,62104237) (62335017,62222412,62104236,62104237)

the Shanghai Sailing Program(22YF1455800,21YF1455000) (22YF1455800,21YF1455000)

the Special Innovation Program of Shanghai Institute of Technical Physics,Chinese Academy of Sciences(CX-513,CX-567) (CX-513,CX-567)

红外与毫米波学报

1001-9014

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