量子电子学报2026，Vol.43Issue(3)：375-383,9.DOI:10.3969/j.issn.1007-5461.2026.03.005
多通道彩色共聚焦成像系统研究
Research on a multi-channel chromatic confocal imaging system
摘要
Abstract
To address the limitations of slow scanning speed and high system complexity in traditional point-scanning chromatic confocal three-dimensional imaging technology,a multi-point synchronous imaging system based on fiber array and galvanometer-based optical switching mechanism is proposed.The system employs a 32-channel one-dimensional fiber array as the detection core,combined with a high-numerical-aperture dispersive lens and a high-speed galvanometer,to achieve rapid multi-point data acquisition and high-precision topographic reconstruction.Furthermore,a peak-search algorithm is proposed to effectively enhance the accuracy of wavelength determination of the system.The calibration results demonstrate that the system has a longitudinal accuracy of 0.14 µm at 580 nm and 2.46 µm across the working spectral range of 450-700 nm.Based on this,the system has been successfully applied to the inspection of integrated circuit micro-topography.This system significantly improves measurement efficiency while maintaining high resolution,showing strong potential for industrial online applications.关键词
彩色共聚焦测量/三维形貌检测/光纤阵列/光纤切换器Key words
chromatic confocal measurement/three-dimensional topography detection/fiber array/optical fiber switching分类
数理科学引用本文复制引用
池田贵一,臧昊峰,鲁拥华,王沛..多通道彩色共聚焦成像系统研究[J].量子电子学报,2026,43(3):375-383,9.基金项目
国家重点研发计划(2023YFF0715501,2023YFF0715502),安徽省科技创新攻坚计划(202423k09020046),国家自然科学基金青年项目(C类,62505307),中央高校基本科研业务费专项(WK2030000092) （2023YFF0715501,2023YFF0715502）
