计量学报2026，Vol.47Issue(5)：633-645,13.DOI:10.3969/j.issn.1000-1158.2026.05.01
离子与原子探针测试技术发展现状及应用趋势
Current Status and Prospect of Ion and Atom Probe
离子与原子探针专业委员会 1张磊 2翁禄涛 3汪福意 4赵丽霞 5陈建 6丁孙安 7胡蓉 8李海洋 9李慧 10李秋立 11李献华 11李展平12
作者信息
- 1. 中国计量测试学会 离子与原子探针专业委员会,北京 100029
- 2. 中国科学院金属研究所
- 3. 香港科技大学(广州)
- 4. 中国科学院化学研究所
- 5. 天津工业大学
- 6. 中山大学
- 7. 南京大学集成电路学院
- 8. 南京工业大学
- 9. 中国科学院大连化学物理研究所
- 10. 上海大学
- 11. 中国科学院地质与地球物理研究所
- 12. 清华大学分析中心
- 折叠
摘要
Abstract
The working principles and current instrument development status of Secondary Ion Mass Spectrometry(SIMS)and Atom Probe Tomography(APT)are elucidated,analyzing their applications across metals,semiconductors,biology,and geology.SIMS enables trace element characterization and interfacial segregation analysis,playing a pivotal role in semiconductor impurity detection,failure analysis,geological dating,and biomolecular imaging.APT enables atomic-level resolution of material composition and spatial distribution,providing critical support for studies on metal strengthening mechanisms,semiconductor doping distribution,biomineralization,and nano-geochemistry.The development of relevant standards and outlines future trends are summarized,including breakthroughs in instrument sensitivity and resolution,exploration of novel ion sources and in-situ analysis techniques,integration with artificial intelligence for data processing,and continuous refinement of the standards system.These techniques will further advance frontier fields such as advanced materials,life sciences,and earth sciences.关键词
计量学/离子探针/原子探针/标准体系/半导体/金属材料/地质科学/生物医学Key words
metrology/ion probe/atom probe/standard system/semiconductor/metal material/geology science/biomedicine分类
通用工业技术引用本文复制引用
离子与原子探针专业委员会,张磊,翁禄涛,汪福意,赵丽霞,陈建,丁孙安,胡蓉,李海洋,李慧,李秋立,李献华,李展平..离子与原子探针测试技术发展现状及应用趋势[J].计量学报,2026,47(5):633-645,13.
