强激光与粒子束2026，Vol.38Issue(6)：68-74,7.DOI:10.11884/HPLPB202638.260019
激光聚变X射线诊断用高精度多层膜器件与系统技术
High-precision multilayer film optics and systems for X-ray diagnostics in laser-driven inertial confinement fusion
摘要
Abstract
[Backgrounds]Multilayer film optics allow for the accurate characterization of high-energy-density plasmas produced in ICF implosions by capturing critical information—temporal,spatial,and spectral—of X rays,thereby enabling dynamic monitoring of the target.Such comprehensive diagnostics are essential for validating numerical models and understanding the key physics that ultimately determine implosion performance.[Purpose]To address critical X-ray diagnostic applications in ICF research,this paper presents the design,fabrication,characterization,and implementation of high-performance multilayer film optics and systems capable of achieving imaging resolution better than 5 μm,including three critical components:Kirkpatrick-Baez(KB)mirrors,off-axis aspheric mirrors,and Wolter microscopes.[Methods]Key advancements were achieved in X-ray optics,ranging from multi-channel KB mirrors for dual-mode diagnostics,precision-manufactured off-axis aspheres,and comprehensively engineered Wolter microscopes.[Results]Key achievements include a spatial resolution of sub-5 μm using the multi-channel KB mirror system,an exceptional surface figure of 1.56 nm RMS and roughness<0.3 nm on a 50 mm length off-axis asphere via ion beam figuring,and the successful implementation of a full-process methodology for Wolter microscopes.[Conclusions]Breakthroughs in the high-precision manufacturing of multilayer film optics and systems will provide robust technical support for plasma diagnostics in domestic ICF experiments.关键词
X射线诊断/多层膜器件/KB反射镜/非球面反射镜/Wolter元件Key words
X-ray diagnostic/multilayer film optics/KB mirror/aspheric mirror/Wolter micro-optics分类
数理科学引用本文复制引用
苏子净,张众,王占山,黄秋实,伊圣振,张哲,盛鹏峰,余俊,张兴,董佳钦,齐润泽..激光聚变X射线诊断用高精度多层膜器件与系统技术[J].强激光与粒子束,2026,38(6):68-74,7.基金项目
国家自然科学基金项目(12235011、12305365) （12235011、12305365）
