现代电子技术2026，Vol.49Issue(12)：10-15,22,7.DOI:10.16652/j.issn.1004-373X.2026.12.002
基于UWB技术的晶圆传输机器人定位优化算法
Wafer handing robot positioning optimization algorithm based on UWB technology
刘傲林 1荆学东1
作者信息
- 1. 上海应用技术大学 电气与电子工程学院,上海 201418
- 折叠
摘要
Abstract
Traditional laser positioning technology for mobile platforms is not only expensive,but also prone to being obstructed by obstacles and unable to recognize during operation.In addition,the positioning accuracy is also affected by changes in ambient light.In allusion to the positioning problem of wafer handling,a wafer handling platform positioning system based on ultra-wideband(UWB)technology is designed by means of the time-of-flight(TOF)ranging principle,which addresses the issues that traditional laser positioning is susceptible to occlusion and ambient light interference.In allusion to the problems that the single-sided two-way ranging(SS-TWR)algorithm is affected by the frequency deviation of the microcontroller unit(MCU),the improved double-sided two-way ranging(DS-TWR)algorithm combined with the three-sided positioning method is used to eliminate the cumulative error caused by frequency deviation.The experimental simulation platform is built,the motion trajectories of two UWB positioning technologies:SS-TWR and DS-TWR are compared and tested,and the error analysis and data comparison are conducted with traditional laser positioning technology.The experimental results show that the proposed solution can enable the wafer handing platform to realize the positioning accuracy close to that of laser positioning while controlling hardware costs.关键词
超宽带技术/晶圆传输机器人/室内定位/移动平台定位/三边定位/预对准方法/轨迹追踪/双向测距Key words
UWB technology/wafer handling robot/indoor positioning/mobile platform positioning/trilateration/pre-alignment method/trajectory tracking/two-way ranging分类
信息技术与安全科学引用本文复制引用
刘傲林,荆学东..基于UWB技术的晶圆传输机器人定位优化算法[J].现代电子技术,2026,49(12):10-15,22,7.
