中国光学（中英文）2026，Vol.19Issue(3)：515-525,11.DOI:10.37188/CO.2025-0139
面向热敏感基底的低温高性能镀膜工艺
A low-temperature,high-performance coating process for heat-sensitive substrates
摘要
Abstract
To address the challenge of temperature rise control during the coating process for thermally sens-itive substrates(e.g.,epoxy adhesive-bonded structural components),this paper proposes a low-temperature electron beam evaporation coating process.Through a dynamic thermal management strategy featuring seg-mented deposition-cooling cycles,the performance of this process in terms of the core properties(i.e.,stress,adhesion,and optical performance)of metallic reflective films,with silver films as the research subject,was systematically investigated,and the deposition process was optimized by integrating the thermal failure threshold of the epoxy adhesive.Experimental results demonstrate that under strictly controlled substrate temperature conditions,this process not only significantly reduces the residual stress of the reflective film,but also ensures that the interfacial adhesion meets the strictest Class 03 severity level specified in the nation-al standard,the average reflectivity in the visible wavelength range is comparable to that of the traditional continuous coating process(>99%@450-900 nm),and the substrate temperature rise remains consistently below the critical threshold of the epoxy adhesive.Through the synergistic effect of Ion-Assisted Deposition(IAD)and dielectric encapsulation,the oxidation resistance and environmental durability of the silver film are significantly improved,satisfying the long-term service requirements of aerospace optical devices under extreme multi-physics field coupled environments.Further theoretical analysis reveals that the thermal relax-ation mechanisms and structural regulation principles of this process exhibit cross-scenario applicability,providing an innovative solution for high-performance coating of low-temperature-sensitive substrates that balances aerospace reliability and industrial universality.关键词
电子束蒸发/离子辅助沉积/热敏感基底/分段控温/动态热管理策略/金属反射膜/膜层应力Key words
electron beam evaporation/ion-assisted deposition/thermally sensitive substrates/segmented temperature control/dynamic thermal management strategy/metallic reflective coatings/coating stress分类
信息技术与安全科学引用本文复制引用
林柏竹,叶明..面向热敏感基底的低温高性能镀膜工艺[J].中国光学（中英文）,2026,19(3):515-525,11.基金项目
智能轻型超大幅宽高分辨遥感卫星及数据处理技术(No.2025JLGJ0013GX) （No.2025JLGJ0013GX）
长光卫星技术股份有限公司光学镀膜均匀性修正程序开发项目(No.ZYGCAFKY02024101002)Supported by Intelligent Lightweight Ultra-Wide Swath High-Resolution Remote Sensing Satellite and Data Processing Technology(No.2025JLGJ0013GX) （No.ZYGCAFKY02024101002）
Chang Guang Satellite Technology Co.,Ltd.Optical Coating Uniformity Correction Procedure Development Project(No.ZYGCAFKY02024101002) （No.ZYGCAFKY02024101002）
