国防科技大学学报2026，Vol.48Issue(3)：107-125,19.DOI:10.11887/j.issn.1001-2486.25120019
大行程高谐频柔顺纳米定位技术综述
Review of long range high resonant frequency compliant nanopositioning technology
摘要
Abstract
With the growing demand for nanometer-scale precision in scientific research and industrial production,compliant nanopositioning technology capable of generating and controlling motion with nanometer-level precision has emerged as a key enabler for high-end equipment.The positioning range and resonant frequency determine the workspace and dynamic response of nanopositioning systems.However,there exists an inherent trade-off between them,making it difficult to optimize both simultaneously.This paper focused on the compliant nanopositioning technologies for achieving long range and high resonant frequency.From the perspectives of system configuration and key performance indicators,the intrinsic mechanism underlying the trade-off between positioning range and resonant frequency was introduced.Furthermore,the efforts and practices of researchers worldwide in addressing the trade-off,including the design of nanopositioners based on different actuation methods,as well as related control issues and control strategies,were reviewed.The current research status was analyzed,and future development trends were discussed,providing useful references for the advancement of high-end equipment and precision instruments in our country.关键词
纳米定位/柔顺机构/大行程/高谐振频率/致动器/精密运动控制Key words
nanopositioning/compliant mechanism/long range/high resonant frequency/actuator/precision motion control分类
信息技术与安全科学引用本文复制引用
王湘元,吴昊,余祺,黄维维,朱利民..大行程高谐频柔顺纳米定位技术综述[J].国防科技大学学报,2026,48(3):107-125,19.基金项目
国家自然科学基金资助项目(52335010) （52335010）
流体动力基础件与机电系统全国重点实验室开放基金资助项目(GZKF-202522) （GZKF-202522）
