理化检验-物理分册2026，Vol.62Issue(6)：38-41,4.DOI:10.11973/lhjy-wl250108
基于设备检定的透射电镜测距系统
Transmitted electron microscope distance measurement system based on equipment calibration
摘要
Abstract
In the calibration process of transmission electron microscope equipment,when used manual measurement to measure the distance of standard sample image,the measurement results were prone to significant errors.A transmission electron microscope image distance measurement system was designed and developed,consisting of three core modules.The grayscale information statistics module primarily analyzed the pixel count corresponding to grayscale levels in transmission electron microscope initial images.The scale conversion and analysis module performs grayscale transformation and analysis on raw transmission electron microscope images based on grayscale feature characteristics to enhance scale region information,enabling automatic pixel-to-actual distance conversion by selecting the scale area.The distance measurement and analysis module enhanced the image information of standard sample measurement regions through grayscale transformation of initial images,achieved distance measurement of light/dark stripes in transmission electron microscope fringe images under different magnifications via target measurement functions.Based on the development of this transmission electron microscope distance measurement system,the application of scale analysis,automated measurement,and full-process image processing and analysis methods significantly reduced uncertainty of manud distance measurement,keep measurement errors less than 5%,thereby effectively improved the efficiency and accuracy of transmission electron microscope equipment calibration analysis.关键词
设备检定/透射电镜/距离测量/图像处理/标尺换算Key words
equipment calibration/transmission electron microscopy/distance measurement/image processing/scale conversion分类
机械制造引用本文复制引用
马晓丽,徐楚君,武湘豫,李晓玲..基于设备检定的透射电镜测距系统[J].理化检验-物理分册,2026,62(6):38-41,4.基金项目
上海交通大学决策咨询课题(JCZXSJB2024-26) （JCZXSJB2024-26）
