真空电子技术Issue(3)：26-32,7.DOI:10.16540/j.cnki.cn11-2485/tn.2026.03.04
基于动网格法的微波等离子体多物理场耦合计算模型
A Multiphysics Coupling Computational Model for Microwave Plasma Based on Dynamic Mesh Method
摘要
Abstract
Micro wave plasma chemical vapor deposition(MPCVD)is a key technology for preparing high-quality single crystal diamond.The height of the substrate support in the reactor is an important parameter affecting the plasma distribution and material growth quality,and the movement of the substrate holder has a significant dy-namic impact on plasma morphology and material distribution.However,traditional static simulation methods can-not accurately describe the dynamic evolution process of plasma during the continuous movement of the support platform,and generally ignore the bidirectional coupling effect between plasma and electromagnetic field during the movement of the support platform.To accurately capture the dynamic process,the dynamic grid technique of arbi-trary Lagrangian Euler method is introduced into MPCVD multi physics field simulation for the first time,and the grid partitioning method and phased solving method are adopted to achieve multi physics field coupled dynamic simulation.The comparison between simulation results and experimental data shows that the model can accurately predict the evolution process of plasma at different platform heights,and the simulated number density of hydrogen atoms in the plasma center is consistent with the trend of Hα spectral line intensity in optical emission spectra.The study provides a reliable simulation tool for the dynamic optimization of the pedestal height in MPCVD process,which has important guiding significance for achieving controllable preparation of large-sized single crystal diamonds.关键词
多物理场耦合/MPCVD/动网格法/金刚石沉积/任意拉格朗日-欧拉方法(ALE)Key words
Multiphysics coupling/MPCVD/Moving mesh method/Diamond deposition/Arbitrary Lagrang-ian Euler method分类
信息技术与安全科学引用本文复制引用
范璇,胡也岱,王舸,朱铧丞,杨阳..基于动网格法的微波等离子体多物理场耦合计算模型[J].真空电子技术,2026,(3):26-32,7.基金项目
国家自然科学基金(62571356) （62571356）
国家重点研发项目(2023YFB4603500) （2023YFB4603500）
