表面技术2026，Vol.55Issue(12)：267-278,12.DOI:10.16490/j.cnki.issn.1001-3660.2026.12.020
一种散热系统进风量监测传感器的结构设计与仿真
Structural Design and Simulation of An Air Inflow Monitoring Sensor for Heat Dissipation Systems
摘要
Abstract
To address the persistent challenges of temperature drift interference,insufficient sensitivity in the low-pressure region,and high implementation cost in existing airflow sensing technologies for heat dissipation systems,the work aims to propose a novel integrated air inflow monitoring sensor based on carbon nanotube(CNT)functional materials and a dual-mode perception architecture.The sensor monolithically integrates a micro-pressure sensing unit and a temperature sensing unit on a single substrate,enabling simultaneous monitoring of airflow-induced pressure variations and environmental temperature.A key structural innovation lies in the introduction of a stress-concentrating boss within the pressure unit,which amplifies localized strain and significantly enhances piezoresistive responsivity under weak airflow excitation.Meanwhile,the temperature sensing unit employs a voltage-divider-based measurement circuit to realize real-time and accurate acquisition of ambient temperature,which provides a reference for correcting temperature-related errors in pressure signals,and effectively suppresses the effect of thermo-mechanical cross-interference on measurement accuracy. A finite element analysis(FEA)model was established to investigate the structural mechanics,resistance evolution,and sensing characteristics of the proposed device.Special attention was given to the effect of the boss height of the sensitive layer and the major axis size of the ellipsoid on the sensitivity response characteristics of the sensor.Multiple structural configurations with different boss heights and different ellipsoid major axis sizes were comparatively analyzed.Simulation results verified that all structures exhibited clear and monotonic resistance-pressure relationships within 0-100 kPa,confirming the feasibility of the sensing mechanism and low-pressure sensing.More important,notable performance differentiation was observed in the low-pressure working region.The sensitive layer with a 300 μm boss height and a microstructure with a smaller major axis size exhibited the most excellent low-pressure region performance,with the most significant resistance change and the highest initial sensitivity.Its sensitivity curve demonstrated an evident"rise-peak-decline"evolution,reaching a pronounced maximum near approximately 16 kPa,indicating its superior suitability for detecting subtle airflow disturbances and early-stage airflow degradation.In comparison,increasing boss height reduced strain localization,weakened the electrical response amplitude,and shifted the optimal working region toward higher pressures. In parallel with structural optimization,the dual-mode sensing design allows coordinated utilization of temperature and pressure information.The temperature sensing unit provides real-time environmental temperature references,enabling compensation for thermally induced drift in the pressure signal and significantly improving measurement robustness in variable thermal environments.This collaborative sensing paradigm fundamentally overcomes limitations of traditional single-parameter airflow sensors,tending to lose accuracy when airflow variations and temperature fluctuations coexist. From a manufacturing perspective,the proposed sensor structure shows good potential compatibility with scalable micro and nano fabrication technologies.Considering the structural characteristics and material system,the device can potentially be fabricated through either nanoimprint technology(NIL)or laser direct writing(LDW),and both routes are capable of realizing microstructural formation together with the construction of the CNT based sensitive layer.In the NIL route,stress concentrating features such as bosses and strain beams can be replicated with high geometric fidelity through template transfer,while CNT-polymer composite sensitive layers can be concurrently or subsequently integrated into the imprinted microstructures,indicating suitability for uniform and scalable fabrication.In the LDW route,localized laser processing can simultaneously define microstructural regions and selectively pattern CNT functional films and electrode networks on the same substrate,providing a rapid and flexible pathway for device construction.These complementary fabrication routes indicate promising engineering feasibility and scalability potential for future implementation. In summary,this work presents an integrated airflow monitoring sensor featuring stress-induced strain amplification,dual-mode perception,temperature-adaptive compensation,and validated low-pressure superiority.The results provide new insights into structural enhancement strategies for micro-pressure sensing and deliver a feasible,high-performance,and cost-effective solution for advanced thermal management monitoring applications.关键词
微压力感知/温度感知/双模态集成/应力集中结构/碳纳米管/进风量监测Key words
micro-pressure monitoring/temperature sensing/dual-mode integration/stress-concentrating boss/carbon nanotube(CNT)/air inflow monitoring分类
信息技术与安全科学引用本文复制引用
李瑶,曾祥琼..一种散热系统进风量监测传感器的结构设计与仿真[J].表面技术,2026,55(12):267-278,12.基金项目
国家自然科学基金面上项目(22478245) （22478245）
山西省重点研发计划项目(202402040201002) National Natural Science Foundation of China(22478245) （202402040201002）
Shanxi Provincial Key Research and Development Program(202402040201002) （202402040201002）
