华侨大学学报（自然科学版）2026，Vol.47Issue(4)：426-431,6.DOI:10.11830/ISSN.1000-5013.202601033
热力耦合对单晶氮化镓磨削去除机理的影响
Effect of Thermo-Mechanical Coupling on Grinding Removal Mechanism of Single Crystal Gallium Nitride
摘要
Abstract
To investigate the thermal effects and its action mechanism on the material removal mechanism dur-ing the grinding process of single crystal gallium nitride(GaN),dry grinding experiments with various pro-cessing parameters were conducted on the c-plane GaN((0001)plane)using a friction and wear tester.The grinding temperature in the grinding area was monitored in real time by a high-speed infrared thermal imager.Combined with the surface morphologies after processing,the regulatory effect of temperature on machining quality and material removal mechanism were analysed.The results showed that the grinding temperature rose with the increase of normal load and spindle speed,and the spindle speed exhibiting a more significant effect on the grinding temperature.A relatively low surface roughness could be achieved by optimizing the processing parameters.With the increase of spindle speed,the proportion of plastic removal areas on the material surface morphology also increased due to the higher grinding temperature.关键词
单晶氮化镓/磨削温度/表面粗糙度/材料去除机制Key words
single crystal gallium nitride/grinding temperature/surface roughness/material removal mecha-nism分类
矿业与冶金引用本文复制引用
汪云鹏,李鑫,肖嘉煊,陈伟,吴跃勤..热力耦合对单晶氮化镓磨削去除机理的影响[J].华侨大学学报（自然科学版）,2026,47(4):426-431,6.基金项目
国家自然科学基金面上资助项目(52075189) （52075189）
