强激光与粒子束2026，Vol.38Issue(7)：182-187,6.DOI:10.11884/HPLPB202638.250483
超薄铍窗X射线管的研制
Development of ultra-thin beryllium window X-ray tubes
摘要
Abstract
[Background]Low-energy X-ray spectra are essential for the characterization of light elements in X-ray fluorescence(XRF)analysis and other related measurement techniques.To minimize the absorption of low-energy X-rays and improve their utilization efficiency,low-atomic-number materials are typically employed as X-ray transmission windows,among which beryllium(Be)foil is the most widely used.[Purpose]This paper aims to develop an X-ray tube equipped with an ultra-thin beryllium window with a thickness of 30 μm,and investigate its performance including X-ray transmission characteristics,spectral features and operational reliability.[Methods]A sealed-off 100 kV X-ray tube with a 30 μm ultra-thin beryllium window was designed,fabricated and experimentally tested.X-ray transmittance,focal spot and beam current were analyzed via numerical simulation.Vacuum brazing and vacuum baking processes were adopted to ensure the welding tightness of the beryllium window and long-term vacuum stability inside the tube.Prototyped X-ray tubes were tested in terms of focal spot,beam current and energy spectrum,and an 8-hour continuous operation experiment was carried out to evaluate the long-term operational reliability of the X-ray tube.[Results]A 100 kV X-ray tube with a 30 μm ultra-thin beryllium window was successfully developed.Simulation results show that for soft X-rays in the energy range of 1-5 keV,the transmittance of the 30 μm beryllium window is approximately 67%higher than that of a conventional 200 μm beryllium window.Performance tests indicate that the X-ray tube achieves a tube current of 1 mA and an output power of 100 W at a filament operating current of 2.07 A,with a focal spot size of 0.74 mm×0.83 mm.The obtained X-ray spectrum presents typical continuous bremsstrahlung radiation together with characteristic X-ray lines of the tungsten target.The 8-hour long-term reliability test demonstrates that the ultra-thin beryllium window X-ray tube operates steadily without failure,arcing or overcurrent,and the tube current remains stable during continuous operation.[Conclusions]The X-ray tube with a 30 μm ultra-thin beryllium window remarkably optimizes the transmission performance of soft X rays.Comprehensive performance indicators,including filament current,focal spot size and spectral characteristics,satisfy the application requirements of fluorescence analysis under high-power and high-voltage operating conditions.No performance degradation is observed after the experiment,verifying excellent long-term operational stability and reliability of the device.关键词
超薄铍窗/荧光分析/X射线管/漏率/X射线透过率Key words
ultra-thin beryllium window/fluorescence analysis/X-ray tube/leakage rate/X-ray transmittance分类
信息技术与安全科学引用本文复制引用
陈欣,李天涛,何小中,赵伟,杨洁,李建北,秦臻,李晨,刘平,黄刚,向军..超薄铍窗X射线管的研制[J].强激光与粒子束,2026,38(7):182-187,6.基金项目
中央引导地方资金科技创新基地项目(2025ZYDF018) （2025ZYDF018）
