现代应用物理2026，Vol.17Issue(3)：73-80,8.DOI:10.12061/j.issn.2095-6223.202509002
基于半导体固态开关的Marx发生器设计与实验研究
Research on an All-Solid-State Marx Generator Based on Semiconductor Switches
摘要
Abstract
This paper presents a study on potting-type solid-state switches using silicon-based N-MCT semiconductor chips and proposes an RLC series discharge-based testing method for measuring key parameters such as on-state inductance,on-state resistance,and jitter of individual switches.Furthermore,an experimental three-stage Marx generator using solid-state switches is developed,where magnetic core induction is employed to achieve synchronized switch driving while providing isolation protection for the drive circuit board.In addition,high-value resistors are used to set reference potentials,balancing the voltage difference between the trigger and main electrodes to preventing internal breakdown.Experimental results show that the switch achieves an on-state inductance of 17 nH,an on-state resistance of 0.2 Ω,and a jitter of less than 0.5 ns.The three-stage Marx generator operates stably with a 5 V pulse drive,delivering 27 kV high-voltage pulses at a charging voltage of 10 kV into a 400 Ω load,with a system jitter of 0.5 ns.The system has demonstrated stable operation over 200 consecutive shots without failure.关键词
半导体固态开关/Marx发生器/低抖动/低电压驱动/隔离保护Key words
semiconductor solid-state switches/Marx generator/low jitter/low-voltage drive/isolation protection分类
信息技术与安全科学引用本文复制引用
高冕,罗维熙,翟戎骁,尹佳辉,伍麒霖..基于半导体固态开关的Marx发生器设计与实验研究[J].现代应用物理,2026,17(3):73-80,8.基金项目
国家自然科学基金资助项目(11705150) （11705150）
