无机材料学报2026，Vol.41Issue(6)：805-813,中插2,10.DOI:10.15541/jim20250354
先进光源装置用碳化硅反射镜性能研究
Performance of Silicon Carbide Mirrors for Advanced Light Source Devices
摘要
Abstract
The rapid development of advanced light source technologies,such as synchrotron radiation and X-ray free electron lasers,especially for high-energy and high-brightness X-ray facilities,has become one of the key factors restricting the further improvement of beamline performance.When high-energy beams are irradiated onto the surface of mirrors,the absorption of such energy can cause radiation damage and thermal deformation of the mirrors.This study provides an in-depth exploration of various aspects,including the structural design of mirrors,material selection,performance simulation,prototype fabrication,optical processing,and performance testing.By combining solid-state sintering with precision optical processing technology,a silicon carbide(SiC)planar mirror with high optical properties was developed.The influence of different materials on the thermal deformation of the reflective mirror surface,as well as the impact of surface shape accuracy and roughness control on the optical surface quality of the reflective mirror,was discussed.The research shows that under an absorbed power of 200 W,the modified SiC mirror exhibits approximately 25%reduction in normal deformation along the meridional direction compared to conventional single-crystal silicon mirrors.After optical processing,the peak to valley(PV)value of its mirror surface reaches 24.294 nm,the root mean square(RMS)value reaches 1.680 nm,the surface roughness RMS reaches 0.168 nm,and the gas release rate is 2.40×10-7 Pa·L/(s·cm2).These results meet the requirements for ultra-smooth mirrors in advanced light source facilities,demonstrating the potential of high-performance silicon carbide ceramics as an ideal choice for next-generation mirror applications,instead of single-crystal silicon.关键词
同步辐射/X射线自由电子激光/碳化硅反射镜/面形精度/粗糙度Key words
synchrotron radiation/X-ray free electron laser/silicon carbide mirror/surface shape accuracy/roughness分类
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刘雷敏,刘学建,殷杰,黄政仁,罗红心,何玉梅,金利民,李永杰,刘静雯,魏玉全,孙安乐,陈忠明..先进光源装置用碳化硅反射镜性能研究[J].无机材料学报,2026,41(6):805-813,中插2,10.基金项目
国家自然科学基金(U23A20563,52172077) （U23A20563,52172077）
国家重点研发计划(2024YFB3714704)National Natural Science Foundation of China(U23A20563,52172077) （2024YFB3714704）
National Key R&D Program of China(2024YFB3714704) （2024YFB3714704）
