强激光与粒子束2026，Vol.38Issue(8)：108-129,22.DOI:10.11884/HPLPB202638.260218
米量级大口径强激光光学元器件研制进展
Development progress of meter-scale large-aperture high-power laser optical components
邵建达 1朱美萍 1魏朝阳 2张伟丽 2孙建 2晋云霞 2李海兵 2刘世杰2
作者信息
- 1. 中国科学院 上海光学精密机械研究所 高功率激光元件技术与工程部,上海 201800||中国科学院大学 材料与光电研究中心,北京 100049||中国科学院大学 杭州高等研究院,杭州 310024
- 2. 中国科学院 上海光学精密机械研究所 高功率激光元件技术与工程部,上海 201800||中国科学院大学 材料与光电研究中心,北京 100049
- 折叠
摘要
Abstract
[Background]The development of laser inertial confinement fusion(ICF)driver facilities toward higher energy,larger aperture,and higher repetition rates has imposed increasingly stringent requirements on optical components,including sub-nanometer surface figure accuracy,meter-scale uniformity,high laser-induced damage resistance,and batch-to-batch consistency.Fabrication and evaluation of large-aperture optical components have become critical challenges for the advancement of next-generation high-power laser systems.[Purpose]This review aims to summarize the recent research progress of the Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,in addressing the requirements of laser fusion drivers,with a focus on the entire technological chain of large-aperture optical components.[Methods]The key technologies developed in five major areas are systematically reviewed,including precision manufacturing,high-performance optical coatings,pulse compression gratings,high-power pulsed xenon flashlamps,and high-precision metrology.The review covers data-driven deterministic polishing and sub-aperture polishing techniques for suppressing mid-spatial-frequency errors,fabrication technologies for broadband polarization and low-stress reflective coatings,reflective static full-aperture exposure methods for large-aperture gratings,reliability enhancement of metal-sealed xenon flashlamps,and advanced measurement techniques including in-situ absolute calibration and wavefront stitching interferometry.[Results]The reviewed technologies have been validated through corresponding samples,optical components,and experimental platforms.These achievements provide essential technical support for the manufacturing and performance evaluation of meter-scale optical components used in high-power laser facilities.[Conclusions]Future challenges are discussed,including full-spectrum error control,coordinated suppression of coating defects and stress,manufacturing consistency of ultra-large-aperture components,and traceable precision metrology.These developments provide valuable guidance for the technological selection and engineering implementation of critical optical components in future high-power laser fusion systems.关键词
大口径光学元件/无损抛光/高性能薄膜制备/全口径曝光技术/波前拼接技术Key words
large-aperture optical components/non-damaging polishing/high-performance thin-film coatings/full-aperture exposure technique/wavefront stitching technique分类
数理科学引用本文复制引用
邵建达,朱美萍,魏朝阳,张伟丽,孙建,晋云霞,李海兵,刘世杰..米量级大口径强激光光学元器件研制进展[J].强激光与粒子束,2026,38(8):108-129,22.
