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基于黑磷油墨薄膜的中波红外探测器阵列

朱龙海 王振 胡伟达 段世坤 陈茂华 白雨卓 赵天歌 余羿叶 卫钦 徐腾飞 Martyniuk Piotrt

红外与毫米波学报2026,Vol.45Issue(3):345-356,12.
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红外与毫米波学报2026,Vol.45Issue(3):345-356,12.DOI:10.11972/j.issn.1001-9014.2026.03.001

基于黑磷油墨薄膜的中波红外探测器阵列

Mid-wavelength infrared detector array based on black phosphorus ink thin film

朱龙海 1王振 2胡伟达 3段世坤 2陈茂华 2白雨卓 2赵天歌 2余羿叶 2卫钦 4徐腾飞 4Martyniuk Piotrt5

作者信息

  • 1. 上海大学微电子学院,上海 201800
  • 2. 中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083
  • 3. 上海大学微电子学院,上海 201800||中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083
  • 4. 南通大学微电子学院(集成电路学院),江苏 南通 226019
  • 5. Institute of Applied Physics,Military University of Technology,2 Kaliskiego St.,Warsaw 00-908,Poland
  • 折叠

摘要

Abstract

Mid-wavelength infrared(MWIR)imaging technology plays a crucial role in aerospace,medical diag-nostics,and autonomous driving.Van der Waals material black phosphorus(BP)exhibits exceptionally high car-rier mobility and an ideal direct bandgap,making it a proven candidate for high-performance room-temperature MWIR sensing.However,the stringent growth conditions and anisotropic growth characteristics restrict the devel-opment of BP optoelectronic devices to small-scale laboratory demonstrations.Therefore,there is an urgent need to develop large-scale,uniform,and high-performance BP photodetector arrays.This study employed a room temperature preparation technique to deposit a large-area,uniform,low-oxidation BP ink film onto thin-film tran-sistors,resulting in the development of a 64×64 high-performance MWIR snapshot photodetector array.The room temperature ink preparation process effectively prevents the oxidation of BP during fabrication,achieving an oxidation loss as low as 1.12%.In addition,a gradient centrifugation strategy was employed to optimize the later-al size and thickness distribution of the nanosheets in the BP ink,thereby facilitating the transport of charge carri-ers.The BP ink film array demonstrated a high photoresponsivity of 4.52 mA/W in the MWIR range,with pixel light response non-uniformity as low as 10.1%.This study presents a new approach for advancing large-scale MWIR imaging technology.

关键词

黑磷/油墨薄膜/中波红外/快照成像

Key words

black phosphorus/ink film/mid-wavelength infrared/snapshot imaging

分类

数理科学

引用本文复制引用

朱龙海,王振,胡伟达,段世坤,陈茂华,白雨卓,赵天歌,余羿叶,卫钦,徐腾飞,Martyniuk Piotrt..基于黑磷油墨薄膜的中波红外探测器阵列[J].红外与毫米波学报,2026,45(3):345-356,12.

基金项目

Supported by the National Key Research and Development Program of China(Grant Nos.2023YFB3611400 and 2025YFF0524500),the National Natural Science Foundation of China(Grant Nos.62475275,62174063,62174061,U24A20295,62404230),the China Postdoctoral Science Foundation(Grant Nos.2023TQ0362,GZB20230795,2024M753366),the Basic and Applied Basic Research Foundation of Guangdong Province(Grant No.2023B1515120049),the National Science Centre(NCN)and the National Natural Science Foundation of China(NSFC)"SHENG 3"UMO-2023/48/Q/ST7/0014(NCN)and 162361136587(NSFC). (Grant Nos.2023YFB3611400 and 2025YFF0524500)

红外与毫米波学报

1001-9014

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