红外与毫米波学报2026，Vol.45Issue(3)：411-417,7.DOI:10.11972/j.issn.1001-9014.2026.03.008
小像元碲镉汞长波红外焦平面探测器
Small pixel cadmium telluride mercury long wave infrared focal plane detector
摘要
Abstract
A long wave cadmium telluride mercury 1024×768(10 μm)focal plane detector assembly was prepared by ar-senic ion implantation p-on-n planar junction technology.The cutoff wavelength of the device is 9.61 μm at 77 K.The basic performance of the detector assembly was characterized under half well filling level condition,and the results showed that the non-uniformity of the responsivity was 4.15%,the average NETD was 28.5mK,and the operability was 99.81%.A dedicated metal micro-structure was designed and prepared on the surface of a LW MCT 1024×768(10 μm)focal plane detector chip set,and the crosstalk between pixels was characterized and analyzed.The results showed that device crosstalk was 12.3%,and the MTF was 0.35.Finally,imaging demonstrations of outdoor scene and indoor person were conducted with the detector assembly,both of which showed good imaging effect.关键词
长波/p-on-n/碲镉汞/焦平面探测器/小像元中心距Key words
LWIR/p-on-n/HgCdTe/FPA/small pixel pitch分类
信息技术与安全科学引用本文复制引用
李雄军,姬荣斌,刘艳珍,王世锦,李培源,李红福,梁艳,李根,浦恩昌,赵鹏..小像元碲镉汞长波红外焦平面探测器[J].红外与毫米波学报,2026,45(3):411-417,7.基金项目
云南省科技人才与平台计划项目(202105AD160047) Supported by the Yunnan Science and Technology Talents and Platform Plan Project(202105AD160047) （202105AD160047）
