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基区结构对短波红外异质结晶体管探测器弱光探测性能的影响与机理研究

申哲远 吴彦甫 韩硕 程璐 刘利宁

红外与毫米波学报2026,Vol.45Issue(3):418-426,9.
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红外与毫米波学报2026,Vol.45Issue(3):418-426,9.DOI:10.11972/j.issn.1001-9014.2026.03.009

基区结构对短波红外异质结晶体管探测器弱光探测性能的影响与机理研究

Influence and mechanism of base structure on the weak-light photo-detection of short-wave infrared heterojunction phototransistor

申哲远 1吴彦甫 2韩硕 1程璐 3刘利宁1

作者信息

  • 1. 中国科学院半导体研究所 纳米光电子实验室,北京 100083||中国科学院大学 材料科学与光电技术学院,北京 100049
  • 2. 浙江大学 环境与资源学院,浙江 杭州 310058
  • 3. 中国科学院半导体研究所 纳米光电子实验室,北京 100083
  • 折叠

摘要

Abstract

The demand for high-sensitivity short-wave infrared(SWIR)detection technology is urgent in frontier fields such as lidar and quantum communication.Heterojunction phototransistor(HPT),benefiting from its internal gain mechanism,provides an effective solution for breaking the physical limit of conventional PIN photodetector in sensitivi-ty.This paper focuses on the base-size effect of InP/GaAsSb/InGaAs HPTs with type-II barrier structure.Devices with two different base structures were fabricated by controlling the etching process.Measurement results show that maintain-ing an intact base structure significantly improves device performance:at a bias voltage of-2 V,the responsivity and in-ternal current gain reach 141 A/W and 160,respectively—superior to those of devices with etched bases.Temperature-dependent analysis and size-effect studies further reveal that the dark current of the intact-base device is dominated by diffusion mechanisms and exhibits better dimensional stability,whereas the etched-base device suffers from pronounced generation-recombination current and surface leakage current caused by sidewall defects.Under low-temperature and weak-light conditions,carrier trapping by these defects leads to severe degradation of photo response.This study clari-fies the critical influence of base structural design on HPT performance and provides valuable theoretical and experimen-tal guidance for optimizing high-performance SWIR detectors.

关键词

短波红外/异质结晶体管/探测器/高增益

Key words

short-wave infrared/heterojunction transistor/detector/high gain

分类

数理科学

引用本文复制引用

申哲远,吴彦甫,韩硕,程璐,刘利宁..基区结构对短波红外异质结晶体管探测器弱光探测性能的影响与机理研究[J].红外与毫米波学报,2026,45(3):418-426,9.

基金项目

国家自然科学基金(62204014) Supported by the National Natural Science Foundation of China(NSFC)(62204014) (62204014)

红外与毫米波学报

1001-9014

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