计量学报2026，Vol.47Issue(7)：994-1002,9.DOI:10.3969/j.issn.1000-1158.2026.07.07
纳米光栅间距测量系统的主要误差分析与仿真
Analysis and Simulation of Main Errors in Nano-grating Pitch Measurement System
摘要
Abstract
A theoretical analysis and simulation study on the main error sources of a grating pitch measurement system are conducted based on a direct-tracing grating interferometer.The focus is placed on the influences of pitch error,yaw error,and roll error of the grating under test on the measurement results of grating pitch.Through theoretical analysis,experimental measurement,and uncertainty evaluation,the main error sources of the system are identified.A system model is established using optical simulation software to simulate the displacement of the grating along the vector direction,extract the coherent phase at the detector,and perform phase unwrapping and grating pitch calculation.By varying the rotation angles of the grating under test around the X-,Y-,and Z-axes,the effects on measurement accuracy are systematically analyzed.Simulation results show that when the grating under test has a pitch angle of 0.01°～0.10°,the relative error of the measured grating pitch is 0.12%;when a roll angle of 0.01°～0.10° exists,the relative error reaches 0.41%;and when a yaw angle of 0.01°～0.10° is present,the range of the measured grating pitch is up to 6.9 nm.关键词
纳米光栅/光栅间距/光栅干涉仪/仿真/俯仰误差/偏摆误差/旋转误差Key words
nano-grating/grating pitch/grating interferometer/simulation/pitch error/yaw error/roll error分类
通用工业技术引用本文复制引用
梁利杰,苏祎,刘丽琴,谢张宁,雷李华,管钰晴,徐瑞书,张玉杰,朱言瑧,郭创为,邹文哲..纳米光栅间距测量系统的主要误差分析与仿真[J].计量学报,2026,47(7):994-1002,9.基金项目
国家重点研发计划(2024YFF0619903) （2024YFF0619903）
国家自然科学基金(52475563) （52475563）
上海市科学技术委员会项目(24ZR1492200) （24ZR1492200）
上海市基础研究计划"集成电路"项目(25JD1403500) （25JD1403500）
