中国标准化Issue(z1)：58-64,7.
硅基前驱体标准化发展现状与思考
Current Status and Considerations Regarding the Standardization of Silicon-Based Precursors
摘要
Abstract
Silicon-based precursors fall under the category of precursors in electronic chemicals and serve as source materials for chemical vapor deposition and atomic layer deposition.They are widely used in the deposition processes of the semiconductor industry,including integrated circuits and next-generation displays.As integrated circuit processes continue to evolve,the requirements for silicon-based precursors are becoming increasingly stringent.Currently,there is a mismatch between the status of standards and the realities of the industry,rendering the standards unsuitable for their intended purposes and hindering their ability to fully fulfill their role in supporting and guiding the sector.This paper takes the current development status and needs of the precursors industry as its starting point,analyzes the current state of standards,and proposes ideas and recommendations for the systematic development of precursor standards.关键词
前驱体/硅基前驱体/标准/标准体系Key words
precursors/silicon-based precursors/standards/standards system引用本文复制引用
史泽远,曹可慰,吴怡然,赵俊莎,刘宇..硅基前驱体标准化发展现状与思考[J].中国标准化,2026,(z1):58-64,7.基金项目
本文是国家科技重大专项资助项目"集成电路用关键原辅材料标准体系建设"(项目编号:2026ZD0622700)研究成果. （项目编号:2026ZD0622700）
