传感技术学报2026，Vol.39Issue(7)：1424-1430,7.DOI:10.3969/j.issn.1004-1699.2026.07.002
一种MEMS谐振式传感器谐振频率与Q值的时频域测量方法
A Time-Frequency Domain Measurement of Resonant Frequency and Q Value of a MEMS Resonant Sensor
摘要
Abstract
In order to ensure the sensitivity and stability of MEMS(micro electro mechanical systems)resonant sensors,the frequency and Q value must be measured precisely and effectively.Based on FPGA,an information processing method incorporating fast fourier transform(FFT),linear frequency modulation Z-transform(CZT),and Hilbert transform(Hilbert)is proposed.Firstly,the resonance frequency is obtained by analyzing the residual vibration signal of the resonator with a high-accuracy spectrum through the FFT and CZT transforms.Then,the Hilbert transform is performed on the aftershock signal to obtain the envelope.Finally,the envelope is fitted by using the least squares method to obtain the attenuation coefficient to further derive the Q value.The test results show that the method can accurately obtain the resonance frequency and Q value.The relative error of the resonant frequency reaches the order of 10-4.The relative error of the Q value reaches the order of 10-3,which is higher than that of the conventional spectrum analysis method.The method significantly reduces the measurement time compared to the sweep method.The research results have good references significance for the in-situ measurement of MEMS resonant sensors.关键词
微机电系统/信号处理/时频域测量/谐振传感器/谐振频率/Q值/CZT变换/Hilbert变换Key words
MEMS/signal processing/time-frequency domain measurement/resonant sensors/resonant frequency/Q value/CZT transform/Hilbert transform分类
信息技术与安全科学引用本文复制引用
郭卓勋,刘帅,杜晓辉,张涛,丁炯..一种MEMS谐振式传感器谐振频率与Q值的时频域测量方法[J].传感技术学报,2026,39(7):1424-1430,7.基金项目
国家重点研发计划项目(2023YFB3210804) （2023YFB3210804）
浙江省属高校基本科研业务费专项资金项目(2023YW97) （2023YW97）
