光学精密工程2026，Vol.34Issue(15)：2369-2377,9.DOI:10.37188/OPE.20263415.2369
电容式三维纳米测量测头
Capacitive 3D nanoscale measurement probe
摘要
Abstract
Three-dimensional(3D)nanoprobe systems are critical components of micro/nano coordinate measuring machines;however,the measurement capability of existing probes remains insufficient for de-manding practical applications.To address this limitation,a 3D nanoprobe based on capacitive displace-ment sensing is developed and experimentally evaluated.The probe comprises capacitive displacement sensors,electrode plates,a compliant mechanism,and a stylus.Three high-precision capacitive displace-ment sensors are arranged in an equilateral-triangular configuration.A geometric model converts the sen-sor outputs into the displacement of the probing sphere and determines the probe orientation.Experimental results demonstrated a 3D resolution better than 3 nm.The measurement range reached 260 μm in the hor-izontal direction and 70 μm in the vertical direction.Contact repeatability was better than 9.4 nm horizon-tally and 8.7 nm vertically.These results confirm the suitability of the proposed probe for micro/nanoscale dimensional measurement and support its application in precision manufacturing and inspection.关键词
微纳米测量/三坐标测量机/接触式测头/电容传感器Key words
micro-nano measurement/coordinate measuring machines/contact probes/capacitive sensors分类
机械制造引用本文复制引用
黄强先,张星月,郝蔚宁,赵志浩,张连生,程荣俊,李红莉..电容式三维纳米测量测头[J].光学精密工程,2026,34(15):2369-2377,9.基金项目
国家重点研发计划资助项目(No.2019YFB2004900) （No.2019YFB2004900）
