轻工机械2026，Vol.44Issue(4)：42-49,8.DOI:10.3969/j.issn.1005-2895.2026.04.006
辐照环境下MEMS压力传感器封装的多尺度模拟研究
Multi-Scale Simulation of MEMS Pressure Sensor Packaging under Irradiation Environment
摘要
Abstract
To address the mechanical property degradation of 316L stainless steel-used as the core material of the corrugated diaphragm in oil-filled isolated Micro-Electro-Mechanical Systems(MEMS)pressure sensors-under strong irradiation conditions,the research team adopted a cross-scale simulation method combining Molecular Dynamics(MD)and Finite Element Analysis(FEA).The regulatory effects of Primary Knock-on Atom(PKA)energy,irradiation temperature,and pre-strain on the evolution of Frenkel defects in 316L steel were systematically investigated,and a quantitative correlation model between defect concentration and the elastic modulus,sensitivity,and failure risk of the diaphragm was established.The results show that the evolution of Frenkel defects proceeds through three stages:rapid proliferation,recombination attenuation,and stable equilibrium.PKA energy is positively linearly correlated with the number of stable defects.High temperatures and compressive pre-strain can inhibit defect retention,while tensile pre-strain promotes defect proliferation.The elastic modulus of the diaphragm decreases linearly with increasing defect concentration,whereas the sensitivity increases.Consequently,the failure risk rises significantly.These research results achieve cross-scale coupled quantification of micro-defects and macro-performance,providing a reference for the design of sensor diaphragms for nuclear environments.关键词
微机电系统/压力传感器/316L不锈钢/波纹膜片/辐照损伤/初级离位原子/跨尺度模拟Key words
MEMS(Micro-Electro-Mechanical Systems)/pressure sensor/316L stainless steel/corrugated diaphragm/irradiation damage/PKA(Primary Knock-on Atom)/cross-scale simulation分类
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潘雨生,王民远,郭贤,魏宁..辐照环境下MEMS压力传感器封装的多尺度模拟研究[J].轻工机械,2026,44(4):42-49,8.基金项目
江苏省基础研究专项资金(基础研究计划)(BK20243023). （基础研究计划）
