上海航天（中英文）2026，Vol.43Issue(4)：92-98,7.DOI:10.19328/j.cnki.2096-8655.2026.04.010
高性能钽酸锂薄膜与碳化硅衬底的声表面波谐振器
High-performance Surface Acoustic Wave Resonator Based on Lithium Tantalate Film and Silicon Carbide
摘要
Abstract
In this paper,a shear horizontal(SH)surface acoustic wave(SAW)resonator based on silicon carbide substrate is proposed,which has a significant improvement in the quality factor compared with the conventional Si substrate-based SAW resonator.The geometrical parameters of the device are determined by analyzing the SH wave propagation characteristics on the LiTaO3/SiO2/SiC multilayer substrate.The micro-nano processing techniques are used to prepare the LiTaO3/SiO2/Si device,and the comparative experiments are carried out.The results show that the LiTaO3/SiO2/SiC device has a quality factor two times that of the LiTaO3/SiO2/Si device,and confirms to the theoretical acoustic wave propagation characteristics.This device is more applicable for filters,oscillators,and sensors than conventional devices.关键词
声学谐振器/声表面波(SAW)器件/碳化硅/品质因数/寄生电导(PSC)效应Key words
acoustic resonator/surface acoustic wave(SAW)device/silicon carbide/quality factor/parasitic surface conduction(PSC)effect分类
信息技术与安全科学引用本文复制引用
吴宗霖,李世佳,钱航宇,杨国敏..高性能钽酸锂薄膜与碳化硅衬底的声表面波谐振器[J].上海航天（中英文）,2026,43(4):92-98,7.基金项目
国家自然科学基金资助项目(62471146) （62471146）
