实验流体力学2026，Vol.40Issue(4)：46-53,8.DOI:10.11729/syltlx20250120
基于干涉法的活塞式液体超微流量标准装置研究
Study on a piston-type liquid ultra-microflow standard device based on the interference method
摘要
Abstract
To achieve metrological calibration of nL/min-level liquid ultra-microflow,a piston-type liquid ultra-microflow standard device based on the interference method has been developed.This device employs laser interference measurement technology to ensure precise capture of the syringe piston's micrometer-level displacement.By establishing a flow calculation model based on the syringe's inner diameter and piston displacement,the uncertainty of each component in the device is analyzed and evaluated.The study used syringes of various specifications to test ultra-microflows in the range of 1-1 000 nL/min.Experimental results demonstrate that the device can detect microscopic changes in ultra-microflow,exhibiting excellent flow response capability.Calibration errors for the syringe pump were below 1%,with an expanded uncertainty of less than 4%(k=2).Finally,comparative experiments between gravimetric and interference method standard devices demonstrated consistent error trends in syringe pump calibration.Further calculation of normalized deviation validated the accuracy of the interference method device and the validity of its uncertainty assessment results.关键词
液体超微流量/标准装置/干涉法/活塞式/不确定度Key words
liquid ultra-microflow/standard device/interference method/piston-type/uncertainty分类
通用工业技术引用本文复制引用
侯立凯,武文泽,郑虹,朱腾飞,范旭,许肖杰,包福兵..基于干涉法的活塞式液体超微流量标准装置研究[J].实验流体力学,2026,40(4):46-53,8.基金项目
国家市场监督管理总局科技计划项目(2025MK192) （2025MK192）
