金刚石与磨料磨具工程2026，Vol.46Issue(4)：446-460,15.DOI:10.13394/j.cnki.jgszz.2025.0076
CVD金刚石薄膜孪晶的研究进展
Research progress of CVD diamond film twins
摘要
Abstract
Significance:Chemical vapor deposition(CVD)diamond films are widely used in the fields of optics and mechanics,as well as in aviation,aerospace,microelectronics and other fields as heat dissipation materials.Although CVD diamond film preparation technology has made great progress,defects are easily produced during the preparation process,and twin crystals are among the common problems,which will affect the morphologies and properties of the diamond films.Twins usually have an adverse effect on the optical properties and thermal transport properties of diamond films,but the mechanical properties can be improved by introducing twins.An in-depth study of the influence of twins on the properties of diamond films is of great significance for improving their quality and application performance.Progress:This paper reviews the definition and classification of twins in CVD diamond films,the generation mechanisms of twins and the effects of twins on the properties of diamond films.The conclusions of this paper can be summarized as follows:(1)The formation of twins is affected by many factors,including temperature,pressure and impurities.Diamond twins can be categorized into contact twins and penetrating twins according to their structural characteristics.Penetrating twins usually originate from the diamond{111}and{100}planes,and the growth mode of penetrating twins is affected by the growth parameter α.The growth mode of contact twins is different from that of penetrating twins,and contact twins only originate from the{111}planes,and Σ3 twins,parallel twins,and fivefold twins are all formed by this growth mode;(2)In the process of CVD diamond film preparation,the formation of twin crystals is unavoidable,but the process parameters can be adjusted to affect the content of twin crystals,for example,when the substrate temperature is lowered,the amount of hydrogen adsorption increases,which promotes the formation of twin crystals;twin crystals will change the morphology of the diamond films and their properties,including optical,mechanical,and thermal transport properties;(3)Twins usually have an adverse effect on the optical properties of CVD diamond films,because twins induce holes in the diamond films,which show a dark appearance under an optical microscope,and the more dark features there are,the lower the infrared transmittance of the diamond films;another type of dark features is different from those formed by the twins,and the reasons for the formation of such dark features is more complicated and is usually affected by metal impurities;(4)Twin crystals usually have a positive effect on the mechanical properties of diamond films due to the hindering effect of the twin grain boundaries on dislocations,which can significantly enhance the hardness and toughness of diamond;(5)The thermal conductivity of diamond is mainly dependent on the phonon heat transfer mechanism,which is dictated by the crystallographic structure and physical properties of diamond.It is shown that twins usually have a negative effect on the thermal transport properties of diamond films,which is attributed to the fact that defects and twins in diamond films reduce the thermal conductivity of diamond films;in addition,first principles and molecular dynamics simulations also show that twins can affect the thermal conductivity of diamond films.Conclusions and prospects:The current state of research shows that twins have different effects on different properties of CVD diamond films,and they usually cause adverse effects in the field of optics and heat transfer,however,in the field of mechanics,the toughness of diamond can be increased by the introduction of twins.This paper discusses research progress on twins in CVD diamond films.It is clear that although the generation of twin crystals is usually unavoidable during the preparation of CVD diamond films,the influence of twin crystals on the properties of diamond films can be clearly determined,and even though it is not possible to quantitatively control the generation of twin crystals,the current status of the research shows that the modulation of the process parameters can effectively control the generation of twin crystals.This paper focuses on the definition,classification,and formation mechanism of twins in CVD diamond films,as well as the regulatory effect of twins on the properties of the films.Studies have shown that research related to twins in CVD diamond films has both engineering application value and scientific exploration significance,and have become one of the core hotspots in this field.Currently,although many breakthroughs have been made in the research on twins in CVD diamond films,there are still many difficulties to be solved in their preparation and application.In the preparation process,precise control over the quantitative formation of twins has not yet been achieved.Although the observation of and research on twins at the microscale are relatively abundant,the controllability at the macroscale is still significantly insufficient,which is largely limited by the development level of existing preparation technologies.At the scientific research level,the effects and macroscopic mechanisms of twins on the properties of CVD diamond films have been basically clarified,but the action mechanism at the microscale still lacks systematic and in-depth scientific demonstration,and the relevant theoretical system needs to be further improved.In addition,the research on the regulation of film properties by twins still needs to be expanded to more emerging fields.As a new functional material with excellent properties,the research on the applications of CVD diamond in electrochemical,biological,and other fields is relatively weak,and the unique role and potential value that twins may play in these fields have not been fully explored.It can be predicted that the research on twins in CVD diamond films will remain a hot topic in the foreseeable future.With the continuous innovation and maturity of CVD diamond film preparation technology,the current engineering and technical bottlenecks and scientific theoretical problems restricting the development of this field will be solved.关键词
金刚石/金刚石薄膜/孪晶/化学气相沉积(CVD)Key words
diamond/diamond films/twins/chemical vapor deposition(CVD)分类
矿业与冶金引用本文复制引用
李利军,任美玲,刘峰斌,安康,许光宇,吴海平,张亚琛,张永康,李自超,肖娜薇,王梦鑫..CVD金刚石薄膜孪晶的研究进展[J].金刚石与磨料磨具工程,2026,46(4):446-460,15.基金项目
国家自然科学基金青年项目(52102034) （52102034）
国家自然科学基金区域联合基金项目(U23A2025) （U23A2025）
北京市教育委员会科学研究计划项目(KM202410009010) （KM202410009010）
北方工业大学有组织科研项目(2023YZZKY12). （2023YZZKY12）
