北京信息科技大学学报（自然科学版）2026，Vol.41Issue(4)：52-58,7.DOI:10.16508/j.cnki.11-5866/n.2026.04.006
基于频差法的多重传感耦合微机械谐振器
Multi-sensing coupled micromachined resonator based on the differential-frequency method
摘要
Abstract
To meet the demand for sensing of many inertial physical quantities,a coupled micromachined resonators multi-sensing scheme based on differential-frequency detection was developed for simultaneous high-precision measurement of mass and acceleration.The system dynamic model with electrostatic excitation were modeled based on coupled beam theory.Key structural parameters and driving conditions were optimized through theoretical analysis and finite element simulations.Mass and acceleration perturbations were separately detected using the differential-frequency method.The influence of coupling strength on the two types of differential-frequency responses was systematically analyzed.Results indicate that differential-frequency responses exhibit good linearity with respect to both mass and acceleration perturbations.Coupling strength has a significant regulatory effect on detection sensitivity.The scheme is proved to be feasible and effective for synchronous sensing of multiple physical quantities.关键词
传感器/模态耦合/多重传感/频差法Key words
sensor/modal coupling/multi-sensing/differential-frequency method分类
信息技术与安全科学引用本文复制引用
赵义恒,王晨先,李伟..基于频差法的多重传感耦合微机械谐振器[J].北京信息科技大学学报（自然科学版）,2026,41(4):52-58,7.基金项目
国家自然科学基金青年基金项目(12202069) （12202069）
北京市教委科研计划科技一般项目(KM202311232009) （KM202311232009）
