传感技术学报2026，Vol.39Issue(8)：1720-1727,8.DOI:10.3969/j.issn.1004-1699.2026.08.006
含三段式微梁的微陀螺参数共振分析及性能提升
Parametric Resonance Analysis and Performance Improvement of a Micro-Gyroscope with a Three-Segment Micro-Beam
摘要
Abstract
For traditional micro-gyroscopes,increasing bandwidth often comes with a significant decrease in sensitivity.Therefore,a three-segment support micro-beam is applied to the micro-gyroscope structure,and parametric resonance is utilized to improve the overall performance of the micro-gyroscope.By establishing an equivalent model of the micro-gyroscope's drive structure with a mass block,the linear and nonlinear amplitude-frequency responses in the driving and detection directions are solved by using the complex exponential method and the multi-scale method.The effects of segmented micro-beam length and folding angle on the gain and bandwidth of the micro-gyroscope under parameter excitation are investigated.The results show that increasing the micro-beam length can improve both bandwidth and sensitivity of micro-gyroscope.Additionally,appropriately increasing the folding angle can significantly widen the bandwidth.With increased parameter excitation amplitude,the gain of the micro-gyroscope is enhanced,the degree of nonlinearity increases,and a flatter response platform emerges,with only a slight reduction in system sensitivity.This helps to solve the contradiction between high sensitivity and wide bandwidth of micro gyroscopes,and allows for achieving both high sensitivity and wide bandwidth in multi-degree-of-freedom micro-gyroscopes.The research results can provide theoretical guidance for the design and optimization of high-performance micro-gyroscope structures,and have certain engineering application value.关键词
微陀螺/多段微梁/参数共振/灵敏度/带宽Key words
micro-gyroscope/segmented micro-beam/parametric resonance/sensitivity/bandwidth分类
信息技术与安全科学引用本文复制引用
郝淑英,刘新,张昆鹏,陈大双..含三段式微梁的微陀螺参数共振分析及性能提升[J].传感技术学报,2026,39(8):1720-1727,8.基金项目
国家自然科学基金项目(12072234) （12072234）
