测试科学与仪器2026，Vol.17Issue(3)：459-467,9.DOI:10.62756/jmsi.1674-8042.2026039
基于镀金PDMS薄膜的光纤F-P传感器用于压力和温度测量
Optic fiber F-P sensor based on a gold-coated PDMS film for pressure and temperature measurements
赵梓鸿 1李锐锐2
作者信息
- 1. 中北大学 极端环境光电动态测试与仪器全国重点实验室,山西 太原 030051
- 2. 中北大学 极端环境光电动态测试与仪器全国重点实验室,山西 太原 030051||山西省交通科学研究院集团有限公司,山西 太原 030032
- 折叠
摘要
Abstract
Optic fiber Fabry-Pérot(F-P)sensors are compact,lightweight,highly sensitive,and resistant to electromagnetic interference,making them increasingly valued in fields such as biomedical and precision detection.This work elucidates a straightforward fabrication method for an optic fiber F-P sensor based on a gold-coated polydimethylsiloxane(PDMS)membrane structure.The F-P cavity of the sensor is composed of a gold film layer on the PDMS surface,the end surface of optical fiber,and an internal air cavity.By taking advantage of the thermal expansion and high deformability of PDMS,the sensitivity of the sensor in temperature and pressure measurements respectively reached 820 nm·℃-1 and 6.05 mm·kPa-1,and the nonlinearity of sensors reached 2.19%of full scale and 6.75%of full scale,respectively.Our work ultimately confirms that the optic fiber F-P sensor based on the gold-coated PDMS film exhibits excellent performance in responding to temperature and pressure measurements.Moreover,the sensor opens new possibilities for future precise measurements in confined environments.关键词
温度/压力/聚合物膜/法布里-珀罗腔/薄膜镀金Key words
temperature/pressure/polymer membrane/Fabry-Pérot cavity/thin film gold plating引用本文复制引用
赵梓鸿,李锐锐..基于镀金PDMS薄膜的光纤F-P传感器用于压力和温度测量[J].测试科学与仪器,2026,17(3):459-467,9.
