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Nano flexible scanning platform and its control algorithm

Xian-guang Fan Jian-sheng Chen Xin Wang Yu-liang Zhi Yong Zuo

纳米技术与精密工程2026，Vol.9Issue(2)：18-29,12.

纳米技术与精密工程2026，Vol.9Issue(2)：18-29,12.DOI:10.1063/5.0272904

Nano flexible scanning platform and its control algorithm

Xian-guang Fan ¹Jian-sheng Chen ¹Xin Wang ¹Yu-liang Zhi ²Yong Zuo³

作者信息

1. Department of Instrumental and Electrical Engineering,School of Aerospace Engineering,Xiamen University,Xiamen 361005,China
2. School of Electrical and Information Engineering,Changzhou Institute of Technology,Changzhou 213032,China
3. Beijing Changcheng Institute of Metrology and Measurement of AVIC,Beijing 100095,China
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摘要

关键词

Nano scanning platform/Flexible hinge structure/Improved sliding mode/Subdivision and segmented calibration

Key words

Nano scanning platform/Flexible hinge structure/Improved sliding mode/Subdivision and segmented calibration

引用本文复制引用

Xian-guang Fan,Jian-sheng Chen,Xin Wang,Yu-liang Zhi,Yong Zuo..Nano flexible scanning platform and its control algorithm[J].纳米技术与精密工程,2026,9(2):18-29,12.

基金项目

The authors would like to acknowledge financial support from the Natural Science Foundation of China(Grant No.21974118). （Grant No.21974118）

纳米技术与精密工程

ISSN：1672-6030

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