有色金属材料与工程2026，Vol.47Issue(3)：19-27,9.DOI:10.13258/j.cnki.nmme.20260324001
PVP链长对CeO2抛光液分散性及CMP性能的影响研究
A study on the effect of PVP chain length on the dispersibility and CMP performance of CeO2 polishing slurry
摘要
Abstract
This study systematically reveals the mechanisms by which the molecular chain length of polyvinylpyrrolidone(PVP)(K17,K30,K60,K90)regulates the morphology,particle size,dispersibility and chemical mechanical polishing(CMP)performance of nano-CeO2.The results indicate that there is a non-linear optimal relationship between PVP chain length and particle size and dispersion stability:the short-chain K17 has insufficient coordination sites and weak steric hindrance,resulting in poor agglomeration suppression;the long-chain K90 is prone to molecular entanglement,resulting in reduced effective coordination efficiency and decreased suspension stability;the medium-chain K60 exhibits the best modification effect,with a CeO2 particle size of 163.46 nm,a zeta potential of-10.54 mV at pH 10,and optimal suspension dispersibility over 24 h,significantly improving particle agglomeration.CMP testing revealed that the K60-modified CeO2 material achieved a removal rate of 283.33 nm/min,with the surface roughness of the K9 glass reduced to as low as 1.004 nm,demonstrating a synergistic improvement in both high removal rate and low surface roughness.The mechanism indicates that PVP coordinates with Ce3+via C=O bonds to form steric hindrance,thereby inhibiting agglomeration and effectively reducing surface damage.This study provides theoretical support for the molecular chain regulation and structural design of high-performance CMP abrasives.关键词
纳米CeO2/PVP改性/悬浮分散性/表面粗糙度/CMPKey words
nano-CeO2/PVP modification/suspension dispersibility/surface roughness/CMP分类
化学化工引用本文复制引用
李鑫,邱名健,倪一鸣,刘明仁,王旭,吴渊,朱镕锋,王觅堂,张栋梁..PVP链长对CeO2抛光液分散性及CMP性能的影响研究[J].有色金属材料与工程,2026,47(3):19-27,9.基金项目
国家重点研发计划资助项目2023YFB3507100 （）
内蒙古自治区科技重大专项2019ZD023 （）
2021ZD0028 （）
