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Scalable and Sustainable Dry Microfabrication Enabled by High-Precision and Wafer-Scale Transfer Lithography of Commercial Photoresists

Qinhua Guo Zhiqing Xu Lizhou Yang Jingyang Zhang Yawen Gan Jiajun Zhang Jiahao Jiang Yunda Wang

纳微快报（英文）2026，Vol.18Issue(11)：1-16,16.

纳微快报（英文）2026，Vol.18Issue(11)：1-16,16.DOI:10.1007/s40820-026-02215-7

Scalable and Sustainable Dry Microfabrication Enabled by High-Precision and Wafer-Scale Transfer Lithography of Commercial Photoresists

Qinhua Guo ¹Zhiqing Xu ¹Lizhou Yang ¹Jingyang Zhang ¹Yawen Gan ¹Jiajun Zhang ¹Jiahao Jiang ¹Yunda Wang²

作者信息

1. Smart Manufacturing Thrust,The Hong Kong University of Science and Technology(Guangzhou),Guangzhou 511400,People's Republic of China
2. Smart Manufacturing Thrust,The Hong Kong University of Science and Technology(Guangzhou),Guangzhou 511400,People's Republic of China||Department of Mechanical and Aerospace Engineering,The Hong Kong University of Science and Technology,Kowloon 999077,Hong Kong,People's Republic of China
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摘要

关键词

Photoresist transfer/Unconventional surface patterning/Reversible adhesion/Sustainable microfabrication/Phase-changing polymers

Key words

Photoresist transfer/Unconventional surface patterning/Reversible adhesion/Sustainable microfabrication/Phase-changing polymers

引用本文复制引用

Qinhua Guo,Zhiqing Xu,Lizhou Yang,Jingyang Zhang,Yawen Gan,Jiajun Zhang,Jiahao Jiang,Yunda Wang..Scalable and Sustainable Dry Microfabrication Enabled by High-Precision and Wafer-Scale Transfer Lithography of Commercial Photoresists[J].纳微快报（英文）,2026,18(11):1-16,16.

基金项目

The Advanced Materials-National Science and Tech-nology Major Project of China(No.2025ZD0616100) （No.2025ZD0616100）

The National Natural Science Foundation of China(No.52375580) （No.52375580）

The Guangdong Basic and Applied Basic Research Foundation(No.2024A1515011397) （No.2024A1515011397）

The Guangdong Science and Technology Programme(No.2025A0505080014) （No.2025A0505080014）

The Department of Educa-tion of Guangdong Province(No.2023ZDZX1036). （No.2023ZDZX1036）

纳微快报（英文）

ISSN：2311-6706

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