宇航材料工艺2026，Vol.56Issue(4)：70-80,11.DOI:10.12044/j.issn.1007-2330.2026.04.006
真空离子镀膜用Ti-Si合金靶材的研究进展及应用概况
Research Progress and Application Overview of Ti-Si Alloy Targets for Vacuum Ion Plating
温凯文 1李启军 1姚草根 1崔子振 1杨亚飞1
作者信息
- 1. 航天材料及工艺研究所,北京 100076
- 折叠
摘要
Abstract
Titanium-silicon(Ti-Si)alloy targets have attracted considerable attention in the field of tool coating due to their outstanding properties.This paper reviews the research progress of Ti-Si alloy targets,with a focus on their phase characteristics,performance indicators,preparation methods,and coating applications.In addition,examples of Ti-Si alloy target applications in improving tool surface hardness and high-temperature resistance are introduced.Finally,the future development directions of Ti-Si alloy targets are discussed.关键词
Ti-Si合金靶材/物相特征/性能指标/制备方法/镀膜应用Key words
Ti-Si alloy target/Phase characteristics/Performance metrics/Fabrication methods/Coating applications分类
矿业与冶金引用本文复制引用
温凯文,李启军,姚草根,崔子振,杨亚飞..真空离子镀膜用Ti-Si合金靶材的研究进展及应用概况[J].宇航材料工艺,2026,56(4):70-80,11.
