液压与气动2026，Vol.50Issue(9)：47-54,8.DOI:10.11832/j.issn.1000-4858.2026.09.006
伯努利吸盘喷嘴结构设计及仿真分析
Design and Simulation of Nozzle Structure for Bernoulli Gripper
摘要
Abstract
The semiconductor industry currently demands low breakage rates and energy efficiency for wafer handling.Bernoulli grippers are widely used due to their simple structure and contamination-free nature.However,high positive pressure during adsorption creates shear stress that damages wafers,while high air consumption leads to energy waste.The nozzle is the core component of the gripper.Its geometry and design parameters determine the pressure distribution and air consumption.We optimize the nozzle structure to achieve low breakage rates and reduced energy consumption.Numerical simulations are carried out using CFD for three nozzle shapes:rectangular,triangular,and arc.We also evaluate three nozzle heights:0.3,0.4 and 0.5 mm.Appropriate evaluation metrics are established to obtain curves of gripper radius versus bottom static pressure.Results indicate that the arc-shaped nozzle with a height of 0.4 mm offers the optimal performance.关键词
伯努利吸盘/喷嘴/CFD/性能设计Key words
Bernoulli gripper/nozzle/CFD/design for performance分类
机械制造引用本文复制引用
王志帅,王海涛,凌青,黄震,庞卓锐..伯努利吸盘喷嘴结构设计及仿真分析[J].液压与气动,2026,50(9):47-54,8.基金项目
国家自然科学基金面上项目(52075065) （52075065）
