中国机械工程2026，Vol.37Issue(8)：1889-1899,11.DOI:10.3969/j.issn.1004-132X.2026.08.008
宏微复合驱动XY工作台解耦设计与实验研究
Decoupling Design and Experimental Research of XY Workbenchs Driven by MMCA
摘要
Abstract
In order to meet the demands of high-end equipment manufacturing for high-performance XY worktables,a design scheme was proposed for the XY workbench driven by macro-micro composite with long stroke and high precision characteristics. Firstly,a novel series-parallel hybrid decoupling guid-ance mechanism was designed,and the dynamics model of the workbenchs was established based on bond graph theory. Secondly,the finite element method and response surface methodology were combined to op-timize the output forces and macro-motion error compensation of the MMCA. Then,through static and modal analysis,the effective load capacity and vibration characteristics of the worktable were obtained. Fi-nally,a prototype of the worktable was fabricated,and an experimental test platform was set up for test-ing. The results show that the optimized MMCA achieves an output forces of 135 N and a macro-motion error compensation of 34 μm at a current of 4 A,representing increases of 32. 61％ and 12. 1％,respec-tively,compared to the pre-optimization values. The worktable's working range is 49. 94 mm×50. 04 mm,with cross-coupling rates of 0. 0511％ and 0. 0549％ in the X and Y directions,respectively. During macro-motion positioning tests with strokes of 1 mm,20 mm,and 49 mm without micro-motion compen-sation,the steady-state displacement errors in both directions are less than 20 μm. When micro-motion compensation is applied for 49 mm stroke positioning,the maximum errors in the X and Y directions are 0. 25 μm and 0. 21 μm,respectively. In the resolution experiments,the resolutions in the X and Y direc-tions reachs 59 nm and 56 nm,respectively.The results demonstrate that the proposed XY workbench driven by MMCA offers advantages such as large stroke,low cross-coupling rate,and high resolution,pro-viding a theoretical and technical foundation for high-performance XY workbenches in high-end equipment manufacturing.关键词
宏微复合驱动器/XY工作台/混合解耦/键合图/响应面法/精密定位Key words
macro-micro composite actuator(MMCA)/XY workbench/hybrid decoupling/bonding diagram/responsive surface optimization/precision positioning分类
机械制造引用本文复制引用
喻曹丰,杨坤,沈刚,肖志豪,王宁..宏微复合驱动XY工作台解耦设计与实验研究[J].中国机械工程,2026,37(8):1889-1899,11.基金项目
国家自然科学基金(52105042) （52105042）
国家自然科学基金联合基金重点项目(U21A20125) （U21A20125）
安徽省自然科学基金(2508085ME134) （2508085ME134）
流体动力基础件与机电系统全国重点实验室开放基金(GZKF-202302) （GZKF-202302）
